Compact helical delay lines embedded in a silicon

Tamotsu Nishino, Moriyasu Miyazaki, Sang Seok Lee, Yukihisa Yoshida, Yoshiyuki Suehiro, Tatsuya Fukami, Tadashi Takagi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Small size quasi-lumped-element helical delay lines are presented. The device is disposed in a dielectric-air-metal (DAM) cavity, which consists of a SiNx membrane above a 30-μm-deep hollow cavity made by silicon micromachining process. The delay line is composed of fine segments of a one-turn inductor and a tiny shunt capacitor whose electrode slips into under the ground pattern. The fineness of the segments realizes linear frequency responses up to more than 40GHz, and the optimal LC values of the segment drastically reduce the wavelength. The compact delay line is useful to reduce the size of microwave components such as phase shifters or feedback amplifiers. The 7-turn, 12-turn and 17-turn helical delay lines were fabricated. The 12-turn delay line showed 450°-delay for 1050-μm-long line with 2.5-dB loss at 30 GHz.

Original languageEnglish
Title of host publicationConference Proceedings- 34th European Microwave Conference
Number of pages4
Publication statusPublished - 2004
Externally publishedYes
EventConference Proceedings- 34th European Microwave Conference - London, United Kingdom
Duration: 2004 Oct 122004 Oct 14

Publication series

NameConference Proceedings- European Microwave Conference


ConferenceConference Proceedings- 34th European Microwave Conference
Country/TerritoryUnited Kingdom

ASJC Scopus subject areas

  • Engineering(all)


Dive into the research topics of 'Compact helical delay lines embedded in a silicon'. Together they form a unique fingerprint.

Cite this