Fingerprint
Dive into the research topics of 'Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Compact slanted comb two-axis micro-mirror scanner fabricated by silicon-on-insulator micromachining
Hoang Manh Chu*, Jun Mizuno, Kazuhiro Hane, Toshiyuki Takagi
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)