Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen

Kwang Soo Seol; Tsuyoshi Futami; Yoshimichi Ohki

doi:10.1063/1.366978

Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen

Kwang Soo Seol^*, Tsuyoshi Futami, Yoshimichi Ohki

^*Corresponding author for this work

Kagami Memorial Research Institute for Materials Science and Technology

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×10²⁰ and 1.0×10¹⁷ cm^-3.

Original language	English
Pages (from-to)	2357-2359
Number of pages	3
Journal	Journal of Applied Physics
Volume	83
Issue number	4
DOIs	https://doi.org/10.1063/1.366978
Publication status	Published - 1998 Feb 15

ASJC Scopus subject areas

Physics and Astronomy(all)

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10.1063/1.366978

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@article{894a764f50054df19e71bd32d0344667,

title = "Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen",

abstract = "Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×1020 and 1.0×1017 cm-3.",

author = "Seol, {Kwang Soo} and Tsuyoshi Futami and Yoshimichi Ohki",

year = "1998",

month = feb,

day = "15",

doi = "10.1063/1.366978",

language = "English",

volume = "83",

pages = "2357--2359",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics Publising LLC",

number = "4",

}

TY - JOUR

T1 - Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen

AU - Seol, Kwang Soo

AU - Futami, Tsuyoshi

AU - Ohki, Yoshimichi

PY - 1998/2/15

Y1 - 1998/2/15

N2 - Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×1020 and 1.0×1017 cm-3.

AB - Using synchrotron radiation as a photon source, photoluminescence spectra were obtained for buried oxide formed by implantation of oxygen. From the spectra, the oxide was known to have relaxed and unrelaxed neutral oxygen vacancies with respective concentrations of 1.4×1020 and 1.0×1017 cm-3.

UR - http://www.scopus.com/inward/record.url?scp=0004905622&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0004905622&partnerID=8YFLogxK

U2 - 10.1063/1.366978

DO - 10.1063/1.366978

M3 - Article

AN - SCOPUS:0004905622

SN - 0021-8979

VL - 83

SP - 2357

EP - 2359

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

ER -

Concentration of neutral oxygen vacancies in buried oxide formed by implantation of oxygen

Abstract

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