Control of a Micromanipulator (3rd Report, Mechanism and Control of a Microactuator)

Toshio Fukuda, Tomoki Nakamura, Takayasu Tanaka, Masaki Esashi, Shuichi Shoji

Research output: Contribution to journalArticlepeer-review


Since micro manipulation is necessary for handling micro order small objects, actuators suitable for a micro manipulator have long been studied. Unlike the conventional actuators, this paper proposes a new electro static actuator with three degrees of freedom for this purpose. Because the tip of a micro manipulator needs multiple degrees of freedom, the proposed actuator can give three DOF, so that the micro manipulator can be improved to accomplish versatile skilful motions. The silicon based micro probe sensible to applied forces is attached at the tip of the actuators. Three modes of motion at the tip of the micro manipulator are demonstrated experimentally. Thus the proposed actuator demonstrates the feasibility of the micro actuator for the micro manipulator.

Original languageEnglish
Pages (from-to)1470-1474
Number of pages5
JournalTransactions of the Japan Society of Mechanical Engineers Series C
Issue number526
Publication statusPublished - 1990
Externally publishedYes


  • Electrostatic Actuator
  • Microactuator
  • Micromanipulator
  • Multiple Degrees of Micromotion
  • Robotics

ASJC Scopus subject areas

  • Mechanics of Materials
  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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