Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane

Takuya Nohara; Takahiko Yanagitani; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1143/JJAP.45.4201

Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane

Takuya Nohara^*, Takahiko Yanagitani, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite c-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by S₁₁ analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.

Original language	English
Pages (from-to)	4201-4203
Number of pages	3
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	45
Issue number	5 A
DOIs	https://doi.org/10.1143/JJAP.45.4201
Publication status	Published - 2006 May 9
Externally published	Yes

Keywords

BAW device
Conversion loss
Pole figure analysis
RF magnetron sputtering
Rocking curve
Shear wave transducer
ZnO film

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/JJAP.45.4201

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Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane. / Nohara, Takuya; Yanagitani, Takahiko; Matsukawa, Mami et al.
In: Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, Vol. 45, No. 5 A, 09.05.2006, p. 4201-4203.

Research output: Contribution to journal › Article › peer-review

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abstract = "Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite c-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by S11 analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.",

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AB - Using an RF magnetron sputtering apparatus, we have fabricated polycrystalline ZnO films whose crystallite c-axes aligned unidirectionally in substrate planes. The films were fabricated by inclining a deposition substrate 30° to an anode and showed a high crystallite orientation in a large area. The conversion losses of shear wave transducers with these films were estimated by S11 analysis. The relationship between the loss and crystalline alignment of the films was carefully investigated by X-ray diffraction measurement.

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KW - Rocking curve

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Conversion characteristics of the shear wave transducer made of unidirectionally aligned ZnO film in plane

Abstract

Keywords

ASJC Scopus subject areas

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