Coverage and properties of a-SiNx hard disk overcoat

Bing K. Yen; Richard L. White; Robert J. Waltman; C. Mathew Mate; Yoshiaki Sonobe; Bruno Marchon

doi:10.1063/1.1543136

Coverage and properties of a-SiN_x hard disk overcoat

Bing K. Yen^*, Richard L. White, Robert J. Waltman, C. Mathew Mate, Yoshiaki Sonobe, Bruno Marchon

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

45 Citations (Scopus)

Abstract

The study of coverage and properties of amorphous silicon nitride (a-SiN_x) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiN_x disk overcoat may be attributed to its high hardness and dense structure.

Original language	English
Pages (from-to)	8704-8706
Number of pages	3
Journal	Journal of Applied Physics
Volume	93
Issue number	10 3
DOIs	https://doi.org/10.1063/1.1543136
Publication status	Published - 2003 May 15
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy(all)

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abstract = "The study of coverage and properties of amorphous silicon nitride (a-SiNx) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 {\AA}. It was concluded that the superior performance of a-SiNx disk overcoat may be attributed to its high hardness and dense structure.",

author = "Yen, {Bing K.} and White, {Richard L.} and Waltman, {Robert J.} and {Mathew Mate}, C. and Yoshiaki Sonobe and Bruno Marchon",

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AU - Yen, Bing K.

AU - White, Richard L.

AU - Waltman, Robert J.

AU - Mathew Mate, C.

AU - Sonobe, Yoshiaki

AU - Marchon, Bruno

PY - 2003/5/15

Y1 - 2003/5/15

N2 - The study of coverage and properties of amorphous silicon nitride (a-SiNx) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiNx disk overcoat may be attributed to its high hardness and dense structure.

AB - The study of coverage and properties of amorphous silicon nitride (a-SiNx) overcoats deposited on magnetic disks by rf-reactive sputtering was presented. It was found by the use of x-ray photoelectron spectroscopy that amorphous silicon nitride has a low coverage-limit of ∼10 Å. It was concluded that the superior performance of a-SiNx disk overcoat may be attributed to its high hardness and dense structure.

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DO - 10.1063/1.1543136

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JF - Journal of Applied Physics

IS - 10 3

ER -

Coverage and properties of a-SiN_x hard disk overcoat

Abstract

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