Crystalline structures of YAlO3 single crystal at high temperatures

Takahiro Inoue; Takaaki Morimoto; Shoji Kaneko; Yosuke Horii; Yoshimichi Ohki

doi:10.1109/ISEIM.2014.6870755

Crystalline structures of YAlO₃ single crystal at high temperatures

Takahiro Inoue, Takaaki Morimoto, Shoji Kaneko, Yosuke Horii, Yoshimichi Ohki

School of Advanced Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

In order to clarify the influence of high temperature annealing on a next-generation gate insulating material YAlO₃, single crystal YAlO₃ samples were annealed at various temperatures from 900 to 1300°C in air for about 12 hours. The crystalline structure was examined by X-ray diffractometry, while the surface profile was examined by atomic force microscopy and a surface profilometer. Furthermore, infrared absorption spectroscopy and optical microscopy were used. As a result, the following serial changes in structure were estimated. The perovskite structure of crystalline YAlO₃ starts to collapse and Y₃Al₅O ₁₂ (YAG) is formed by the annealing at 1160 °C. Then, it segregates to Al₂O₃ andYAlO₃ after the annealing at 1300 °C.

Original language	English
Title of host publication	Proceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014
Publisher	Institute of Electrical Engineers of Japan
Pages	208-211
Number of pages	4
ISBN (Print)	9784886860866
DOIs	https://doi.org/10.1109/ISEIM.2014.6870755
Publication status	Published - 2014 Jan 1
Event	2014 International Symposium on Electrical Insulating Materials, ISEIM 2014 - Niigata, Japan Duration: 2014 Jun 1 → 2014 Jun 5

Publication series

Name	Proceedings of the International Symposium on Electrical Insulating Materials

Other

Other	2014 International Symposium on Electrical Insulating Materials, ISEIM 2014
Country/Territory	Japan
City	Niigata
Period	14/6/1 → 14/6/5

Keywords

Structural changes
Thermal annealing
X-ray diffractometry

ASJC Scopus subject areas

Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/ISEIM.2014.6870755

Cite this

Inoue, T., Morimoto, T., Kaneko, S., Horii, Y., & Ohki, Y. (2014). Crystalline structures of YAlO₃ single crystal at high temperatures. In Proceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014 (pp. 208-211). [6870755] (Proceedings of the International Symposium on Electrical Insulating Materials). Institute of Electrical Engineers of Japan. https://doi.org/10.1109/ISEIM.2014.6870755

Crystalline structures of YAlO₃ single crystal at high temperatures. / Inoue, Takahiro; Morimoto, Takaaki; Kaneko, Shoji et al.
Proceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014. Institute of Electrical Engineers of Japan, 2014. p. 208-211 6870755 (Proceedings of the International Symposium on Electrical Insulating Materials).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Inoue, T, Morimoto, T, Kaneko, S, Horii, Y & Ohki, Y 2014, Crystalline structures of YAlO₃ single crystal at high temperatures. in Proceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014., 6870755, Proceedings of the International Symposium on Electrical Insulating Materials, Institute of Electrical Engineers of Japan, pp. 208-211, 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014, Niigata, Japan, 14/6/1. https://doi.org/10.1109/ISEIM.2014.6870755

Inoue T, Morimoto T, Kaneko S, Horii Y, Ohki Y. Crystalline structures of YAlO₃ single crystal at high temperatures. In Proceedings of 2014 International Symposium on Electrical Insulating Materials, ISEIM 2014. Institute of Electrical Engineers of Japan. 2014. p. 208-211. 6870755. (Proceedings of the International Symposium on Electrical Insulating Materials). doi: 10.1109/ISEIM.2014.6870755

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title = "Crystalline structures of YAlO3 single crystal at high temperatures",

abstract = "In order to clarify the influence of high temperature annealing on a next-generation gate insulating material YAlO3, single crystal YAlO3 samples were annealed at various temperatures from 900 to 1300°C in air for about 12 hours. The crystalline structure was examined by X-ray diffractometry, while the surface profile was examined by atomic force microscopy and a surface profilometer. Furthermore, infrared absorption spectroscopy and optical microscopy were used. As a result, the following serial changes in structure were estimated. The perovskite structure of crystalline YAlO3 starts to collapse and Y3Al5O 12 (YAG) is formed by the annealing at 1160 °C. Then, it segregates to Al2O3 andYAlO3 after the annealing at 1300 °C.",

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