Crystallization behavior during transparent In2O3-ZnO film growth

Junjun Jia; Shin ichi Nakamura; Yuzo Shigesato

doi:10.1002/pssa.201532887

Crystallization behavior during transparent In₂O₃-ZnO film growth

Junjun Jia, Shin ichi Nakamura, Yuzo Shigesato^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

Structural evolution of transparent conductive In₂O₃-ZnO (IZO) films with increasing substrate temperature during sputtering was studied using transmission electron microscopy (TEM) and spectroscopic ellipsometry. Increasing the substrate temperature can induce film crystallization in the initial growth stage, and enhance the crystallization of IZO films. Extensive simulations using ellipsometry data demonstrated a decrease in the crystallization rate for IZO films deposited between 200 and 300 °C, which is attributed to the influence of the interference between nearby growing grains. TEM observations also reveal that the growth competition between different crystallites leads to an increase in the lateral grain size with increasing substrate temperature.

Original language	English
Pages (from-to)	2291-2295
Number of pages	5
Journal	Physica Status Solidi (A) Applications and Materials Science
Volume	213
Issue number	9
DOIs	https://doi.org/10.1002/pssa.201532887
Publication status	Published - 2016 Sept 1
Externally published	Yes

Keywords

crystallization
InO
spectroscopic ellipsometry
thin films
transmission electron microscopy
ZnO

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1002/pssa.201532887

Cite this

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title = "Crystallization behavior during transparent In2O3-ZnO film growth",

abstract = "Structural evolution of transparent conductive In2O3-ZnO (IZO) films with increasing substrate temperature during sputtering was studied using transmission electron microscopy (TEM) and spectroscopic ellipsometry. Increasing the substrate temperature can induce film crystallization in the initial growth stage, and enhance the crystallization of IZO films. Extensive simulations using ellipsometry data demonstrated a decrease in the crystallization rate for IZO films deposited between 200 and 300 °C, which is attributed to the influence of the interference between nearby growing grains. TEM observations also reveal that the growth competition between different crystallites leads to an increase in the lateral grain size with increasing substrate temperature.",

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AU - Jia, Junjun

AU - Nakamura, Shin ichi

AU - Shigesato, Yuzo

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N2 - Structural evolution of transparent conductive In2O3-ZnO (IZO) films with increasing substrate temperature during sputtering was studied using transmission electron microscopy (TEM) and spectroscopic ellipsometry. Increasing the substrate temperature can induce film crystallization in the initial growth stage, and enhance the crystallization of IZO films. Extensive simulations using ellipsometry data demonstrated a decrease in the crystallization rate for IZO films deposited between 200 and 300 °C, which is attributed to the influence of the interference between nearby growing grains. TEM observations also reveal that the growth competition between different crystallites leads to an increase in the lateral grain size with increasing substrate temperature.

AB - Structural evolution of transparent conductive In2O3-ZnO (IZO) films with increasing substrate temperature during sputtering was studied using transmission electron microscopy (TEM) and spectroscopic ellipsometry. Increasing the substrate temperature can induce film crystallization in the initial growth stage, and enhance the crystallization of IZO films. Extensive simulations using ellipsometry data demonstrated a decrease in the crystallization rate for IZO films deposited between 200 and 300 °C, which is attributed to the influence of the interference between nearby growing grains. TEM observations also reveal that the growth competition between different crystallites leads to an increase in the lateral grain size with increasing substrate temperature.

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