Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno; Sharon Farrens; Hiroyuki Ishida; Viorel Dragoi; Hidetoshi Shinohara; Takafumi Suzuki; Masanori Ishizuka; Thomas Glinsner; Shuichi Shoji

doi:10.1109/ICMENS.2005.37

Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

Jun Mizuno^*, Sharon Farrens, Hiroyuki Ishida, Viorel Dragoi, Hidetoshi Shinohara, Takafumi Suzuki, Masanori Ishizuka, Thomas Glinsner, Shuichi Shoji

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

14 Citations (Scopus)

Abstract

Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N₂, O₂, and 10%-H₂/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

Original language	English
Title of host publication	Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages	346-349
Number of pages	4
DOIs	https://doi.org/10.1109/ICMENS.2005.37
Publication status	Published - 2005 Dec 1
Event	2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada Duration: 2006 Jul 24 → 2006 Jul 27

Publication series

Name	Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Conference

Conference	2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Country/Territory	Canada
City	Banff, Alberta
Period	06/7/24 → 06/7/27

Keywords

Activation
Bonding
COP
Micro-channel
Plasma

ASJC Scopus subject areas

Engineering(all)

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10.1109/ICMENS.2005.37

Cite this

Mizuno, J., Farrens, S., Ishida, H., Dragoi, V., Shinohara, H., Suzuki, T., Ishizuka, M., Glinsner, T., & Shoji, S. (2005). Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 (pp. 346-349). Article 1540849 (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005). https://doi.org/10.1109/ICMENS.2005.37

Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. / Mizuno, Jun; Farrens, Sharon; Ishida, Hiroyuki et al.
Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 346-349 1540849 (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mizuno, J, Farrens, S, Ishida, H, Dragoi, V, Shinohara, H, Suzuki, T, Ishizuka, M, Glinsner, T & Shoji, S 2005, Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. in Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005., 1540849, Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005, pp. 346-349, 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005, Banff, Alberta, Canada, 06/7/24. https://doi.org/10.1109/ICMENS.2005.37

Mizuno J, Farrens S, Ishida H, Dragoi V, Shinohara H, Suzuki T et al. Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 346-349. 1540849. (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005). doi: 10.1109/ICMENS.2005.37

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abstract = "Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.",

keywords = "Activation, Bonding, COP, Micro-channel, Plasma",

author = "Jun Mizuno and Sharon Farrens and Hiroyuki Ishida and Viorel Dragoi and Hidetoshi Shinohara and Takafumi Suzuki and Masanori Ishizuka and Thomas Glinsner and Shuichi Shoji",

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AU - Mizuno, Jun

AU - Farrens, Sharon

AU - Ishida, Hiroyuki

AU - Dragoi, Viorel

AU - Shinohara, Hidetoshi

AU - Suzuki, Takafumi

AU - Ishizuka, Masanori

AU - Glinsner, Thomas

AU - Shoji, Shuichi

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N2 - Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

AB - Low temperature direct bonding method of Cyclo-Olefin Polymer (COP) plates (20mm × 40mm × 2.0mm) has been developed employing surface plasma treatment with various gases such as N2, O2, and 10%-H2/Ar. Surface energy of the bonded interface has been measured by razor blade method. Reasonable bonding strength for flow devices was achieved even at room temperature. The contact angle cmeasurements on the sample surfaces after plasma exposure indicated that the plasma activated surfaces became hydrophilic and this activated state lasted for longer than 2 months. This method is useful to fabricate micro-flow devices for single-molecule level optical bio-detection systems that requires less residual stress and deformation after bonding.

KW - Activation

KW - Bonding

KW - COP

KW - Micro-channel

KW - Plasma

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Y2 - 24 July 2006 through 27 July 2006

ER -

Cyclo-olefin polymer direct bonding using low temperature plasma activation bonding

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