TY - JOUR
T1 - Demonstration of ultraprecision ductile-mode cutting for lithium niobate microring waveguides
AU - Takigawa, Ryo
AU - Higurashi, Eiji
AU - Kawanishi, Tetsuya
AU - Asano, Tanemasa
N1 - Funding Information:
The authors would like to thank Dr. A. Ikeda of Kyushu University for the useful discussion. This study was in part supported by the Grant-in-Aid for Scientific Research (No. 80706846) from the Japan Society for the Promotion of Science (JSPS).
Publisher Copyright:
© 2016 The Japan Society of Applied Physics.
PY - 2016/11
Y1 - 2016/11
N2 - In this paper, the application of the ultraprecision ductile-mode cutting method to the fabrication of microring waveguides in lithium niobate crystal was investigated. Although it was difficult to apply a mechanical cutting method to the fabrication of microring waveguides with smooth sidewalls, it was confirmed that no harmful cutting traces on the machined surface occur with the appropriate movement of the cutting tool. The root-meansquare surface roughness of the resulting sidewall was 6.1 nm, which is sufficiently small to suppress the scattering loss of the circulating light. In addition, the conditions for the ductile-mode cutting of lithium niobate crystal were investigated.
AB - In this paper, the application of the ultraprecision ductile-mode cutting method to the fabrication of microring waveguides in lithium niobate crystal was investigated. Although it was difficult to apply a mechanical cutting method to the fabrication of microring waveguides with smooth sidewalls, it was confirmed that no harmful cutting traces on the machined surface occur with the appropriate movement of the cutting tool. The root-meansquare surface roughness of the resulting sidewall was 6.1 nm, which is sufficiently small to suppress the scattering loss of the circulating light. In addition, the conditions for the ductile-mode cutting of lithium niobate crystal were investigated.
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U2 - 10.7567/JJAP.55.110304
DO - 10.7567/JJAP.55.110304
M3 - Article
AN - SCOPUS:84994791044
SN - 0021-4922
VL - 55
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - 11
M1 - 110304
ER -