Deposition of multicomponent metallic glass films by single-target magnetron sputtering

Y. H. Liu; T. Fujita; A. Hirata; S. Li; H. W. Liu; W. Zhang; A. Inoue; M. W. Chen

doi:10.1016/j.intermet.2011.10.007

Deposition of multicomponent metallic glass films by single-target magnetron sputtering

Y. H. Liu, T. Fujita, A. Hirata, S. Li, H. W. Liu, W. Zhang, A. Inoue, M. W. Chen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

50 Citations (Scopus)

Abstract

Multicomponent metallic glass films inheriting the superior mechanical properties and wide supercooled liquid regions of their bulk counterparts attract increasing attentions for applications in micro-electro-mechanical systems and nano-devices. In this paper, we systematically investigated the growth of multicomponent metallic glass films synthesized using single-target magnetron sputtering. It was found that the working argon gas pressures (P _Ar,) and sputtering power are two key factors governing film growth and composition. At high P_Ar, the glassy films grow via a columnar mode, leading to rough film surface. At low P_Ar, the films exhibit a negative growth exponent and a nearly atomically flat surface. At appropriate sputtering power and P_Ar, the films can completely inherit the composition of alloy targets, which makes it possible to fabricate multicomponent glassy films with controllable composition using single targets. The mechanisms accounting for the growth of the glassy films are discussed in the framework of dynamic scaling theory. The diversely tunable film microstructure and composition are expected to lead metallic glasses towards new functional applications.

Original language	English
Pages (from-to)	105-114
Number of pages	10
Journal	Intermetallics
Volume	21
Issue number	1
DOIs	https://doi.org/10.1016/j.intermet.2011.10.007
Publication status	Published - 2012 Feb
Externally published	Yes

Keywords

B. Glasses, metallic
C. Thin films
C. Vapour deposition (physical and chemical)
F. Microscopy, various

ASJC Scopus subject areas

Chemistry(all)
Mechanics of Materials
Mechanical Engineering
Metals and Alloys
Materials Chemistry

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10.1016/j.intermet.2011.10.007

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title = "Deposition of multicomponent metallic glass films by single-target magnetron sputtering",

abstract = "Multicomponent metallic glass films inheriting the superior mechanical properties and wide supercooled liquid regions of their bulk counterparts attract increasing attentions for applications in micro-electro-mechanical systems and nano-devices. In this paper, we systematically investigated the growth of multicomponent metallic glass films synthesized using single-target magnetron sputtering. It was found that the working argon gas pressures (P Ar,) and sputtering power are two key factors governing film growth and composition. At high PAr, the glassy films grow via a columnar mode, leading to rough film surface. At low PAr, the films exhibit a negative growth exponent and a nearly atomically flat surface. At appropriate sputtering power and PAr, the films can completely inherit the composition of alloy targets, which makes it possible to fabricate multicomponent glassy films with controllable composition using single targets. The mechanisms accounting for the growth of the glassy films are discussed in the framework of dynamic scaling theory. The diversely tunable film microstructure and composition are expected to lead metallic glasses towards new functional applications.",

keywords = "B. Glasses, metallic, C. Thin films, C. Vapour deposition (physical and chemical), F. Microscopy, various",

author = "Liu, {Y. H.} and T. Fujita and A. Hirata and S. Li and Liu, {H. W.} and W. Zhang and A. Inoue and Chen, {M. W.}",

note = "Funding Information: The work was sponsored by the “Grant-in-Aid for Young Scientists B” of JSPS, the “ Fusion Research Fund ” of WPI-AIMR, Tohoku University , and “ World Premier International (WPI) Center Initiative ”, MEXT , Japan.",

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AU - Liu, Y. H.

AU - Fujita, T.

AU - Hirata, A.

AU - Li, S.

AU - Liu, H. W.

AU - Zhang, W.

AU - Inoue, A.

AU - Chen, M. W.

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AB - Multicomponent metallic glass films inheriting the superior mechanical properties and wide supercooled liquid regions of their bulk counterparts attract increasing attentions for applications in micro-electro-mechanical systems and nano-devices. In this paper, we systematically investigated the growth of multicomponent metallic glass films synthesized using single-target magnetron sputtering. It was found that the working argon gas pressures (P Ar,) and sputtering power are two key factors governing film growth and composition. At high PAr, the glassy films grow via a columnar mode, leading to rough film surface. At low PAr, the films exhibit a negative growth exponent and a nearly atomically flat surface. At appropriate sputtering power and PAr, the films can completely inherit the composition of alloy targets, which makes it possible to fabricate multicomponent glassy films with controllable composition using single targets. The mechanisms accounting for the growth of the glassy films are discussed in the framework of dynamic scaling theory. The diversely tunable film microstructure and composition are expected to lead metallic glasses towards new functional applications.

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Deposition of multicomponent metallic glass films by single-target magnetron sputtering

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Keywords

ASJC Scopus subject areas

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