Deposition of NdBa2Cu3O7-δ thin films on large area of over 5 in. in diameter

S. Karimoto*, H. Sato, H. Shibata, T. Makimoto

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


We report the deposition of NdBa2Cu3O7-δ (NBCO) thin films with a large diameter of over 5 in. by molecular-beam epitaxy (MBE). We examined the uniformity of the film composition and Tc for areas with a diameter of 140 mm. The film composition was Ba/Nd:Cu/Nd = 1.79 ± 0.02:2.97 ± 0.04, which indicates a uniform deposition over a large area. The Tc values only varied from 90.4 K to 91.6 K, which also confirms the uniform deposition. Thus our deposition method appears to be promising for producing thin film on a commercial scale.

Original languageEnglish
Pages (from-to)927-929
Number of pages3
JournalPhysica C: Superconductivity and its applications
Issue numberSUPPL.
Publication statusPublished - 2007 Oct 1
Externally publishedYes


  • HTSC
  • MBE
  • NBCO
  • Thin film

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Energy Engineering and Power Technology
  • Electrical and Electronic Engineering


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