@inproceedings{e1daeafaa7d44618bb1c9e4a9d69c942,
title = "Design and fabrication of multi-metal electrodes implanted PDMS structures for micro flow devices using 3-D assembly",
abstract = "3-D metal embedded structure was realized by folding PDMS structure. Accurate angle of 90 degree between the each electrodes are obtained using the guide structure. A fluoro resin on the metal layer was used to avoid the clack resulting from residual stress and also to protect from organic solvent generating during photolithography. By applying high electric field of 2000 V/cm on facing electrodes, the static field effect on styrene polymer micro sphere is confirmed.",
keywords = "Assembly, Chemical analysis, Electrodes, Fabrication, Fluidic microsystems, Inductors, Microchannel, Microfluidics, Silicon, Transducers",
author = "M. Ishizuka and M. Abe and H. Houjou and S. Shoji and J. Mizuno and K. Tsutsui and Y. Wada",
note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
year = "2003",
doi = "10.1109/SENSOR.2003.1216936",
language = "English",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "999--1002",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
}