Design and verification of quartz resonators with quasi-convex structure

Hiroshi Oigawa*, Keisuke Hayama, Jing Ji, Satoshi Ikezawa, Toshitsugu Ueda

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review


Recently, AT-cut quartz resonators have found widespread use as RF and high-sensitivity devices. In these applications, further miniaturization and high-frequency stability are required. To achieve a high quality (Q)-factor and high productivity, the authors have proposed a novel resonator shape in which the surface is machined as a three-dimensional stripe-like structure. This shape is called quasi-convex. In this paper, we discuss the design and fabrication of quasi-convex resonators to verify their effectiveness. First, with regard to the height of the convex part and the pitch of the quasi-convex pattern, the optimal resonator design is discussed on the basis of the results of a finite-element method simulation. Then, prototypes of the quasi-convex resonators fabricated by deep reactive-ion etching and micro electro-mechanical systems fabrication technology are presented. In our experiments, the highest Q-factor is obtained when the height ratio of the convex part was 5% and the pitch is 100 μm. In addition, the Q-factor of the quasi-convex resonators is seven times greater than that of ordinary plane-shaped resonators, as confirmed using vacuum equipment.

Original languageEnglish
Pages (from-to)47-51
Number of pages5
JournalIEEJ Transactions on Sensors and Micromachines
Issue number3
Publication statusPublished - 2014


  • DRIE
  • FEM
  • Plano-convex
  • Q-factor
  • Quartz resonator
  • Quasi-convex

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering


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