TY - JOUR
T1 - Desktop type equipment of thermal-assisted UV roller imprinting
AU - Shibazaki, Tomotaka
AU - Shinohara, Hidetoshi
AU - Hirasawa, Tamano
AU - Sakai, Nobuji
AU - Taniguchi, Jun
AU - Mizuno, Jun
AU - Shoji, Shuichi
N1 - Copyright:
Copyright 2010 Elsevier B.V., All rights reserved.
PY - 2010/1
Y1 - 2010/1
N2 - Desktop type equipment of thermal-assisted UV roller imprinting was developed. A remarkable advantage of the desktop type equipment is expected to be easy evaluation of replication results using different molds with small amounts of resin. Replication tests were carried out under various Scanning speed of the stage, UV intensity, and roll temperature. Pattern replication was improved by heating roll under the same scanning speed of stage. Heating of the roll was effective to realize better pattern replication under the same scanning speed of the stage.
AB - Desktop type equipment of thermal-assisted UV roller imprinting was developed. A remarkable advantage of the desktop type equipment is expected to be easy evaluation of replication results using different molds with small amounts of resin. Replication tests were carried out under various Scanning speed of the stage, UV intensity, and roll temperature. Pattern replication was improved by heating roll under the same scanning speed of stage. Heating of the roll was effective to realize better pattern replication under the same scanning speed of the stage.
KW - Desktop type equipment
KW - Roll temperature
KW - UV roller imprinting
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U2 - 10.2494/photopolymer.22.727
DO - 10.2494/photopolymer.22.727
M3 - Article
AN - SCOPUS:77952187850
SN - 0914-9244
VL - 22
SP - 727
EP - 730
JO - Journal of Photopolymer Science and Technology
JF - Journal of Photopolymer Science and Technology
IS - 6
ER -