Original language | English |
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Pages (from-to) | 267-279 |
Number of pages | 13 |
Journal | Shinku/Journal of the Vacuum Society of Japan |
Volume | 27 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1984 |
Externally published | Yes |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering