Development of a compact X-ray source and super-sensitization of photo resists for soft x-ray imaging

Tomoko Gowa*, Naoyuki Fukutake, Yoshimasa Hama, Kentaro Hizume, Takashi Kashino, Shigeru Kashiwagi, Ryunosuke Kuroda, Akihiko Masuda, Akihiro Oshima, Taku Saito, Kazuyuki Sakaue, Kunio Shinohara, Tomohiro Takahashi, Tatsuya Urakawa, Kiminori Ushida, Masakazu Washio

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Development of a compact X-ray source and super-sensitization of photo resists for soft x-ray imaging'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science