Development of a high energy resolution X-ray microcalorimeter using Ti/Au TES

Hiroyuki Kudo*, Yuichi Yokoyama, Shuichi Shoji, Tohru Oshima, Youichi Aruga, Kana Maegami, Ryuichi Fujimoto, Miyazaki Toshiyuki, Kazuhisa Mitsuda

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review


A prototype of an X-ray microcalorimeter using Titanium/Gold transition edge sensor (TES) for detecting cosmic rays is fabricated and tested. This paper reports first experimental result of the prototype. By using silicon bulk micromachining, freestanding microstructure suspended with fine beams are obtained to achieve thermal isolation from the substrate. A superconductor, Ti in this case, can be used as a very sensitive temperature sensor at the narrow temperature range around its transition temperature. At the low temperatures below 1 K, the microstructure with very small heat capacity is expected to be thermally detecting single photons. Design consideration to realize radiation detection with extremely good energy resolution has been taken place. Our tentative goal is to obtain the energy resolution of 20 eV for 10 keV radiation at 0.5 K. We have fabricated a test device of the TES. The sensitivity of it is larger than 1000, which is enough for this purpose. The energy resolution of the prototype of the X-ray microcalorimeter was 550 eV (FWHM) for 6 keV radiation at approximately 0.5 K. This value is smaller than that expected. An optimization of the TES features is still necessary for a good energy resolution.

Original languageEnglish
Pages (from-to)241-249
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 1999 Dec 1
EventProceedings of the 1999 Design, Characterization, and Packaging for MEMS and Microelectronics - Royal Pines Resort, Aust
Duration: 1999 Oct 271999 Oct 29

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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