Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes

Dong Hyun Yoon; Hironobu Sato; Asahi Nakahara; Tetsushi Sekiguchi; Satoshi Konishi; Shuichi Shoji

doi:10.1088/0960-1317/24/9/095003

Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes

Dong Hyun Yoon^*, Hironobu Sato, Asahi Nakahara, Tetsushi Sekiguchi, Satoshi Konishi, Shuichi Shoji

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.

Original language	English
Article number	095003
Journal	Journal of Micromechanics and Microengineering
Volume	24
Issue number	9
DOIs	https://doi.org/10.1088/0960-1317/24/9/095003
Publication status	Published - 2014 Sept 1

Keywords

EHD micropump
SU-8 pyrolysis
carbon electrode
micromesh

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/0960-1317/24/9/095003

Cite this

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title = "Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes",

abstract = "An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.",

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AU - Yoon, Dong Hyun

AU - Sato, Hironobu

AU - Nakahara, Asahi

AU - Sekiguchi, Tetsushi

AU - Konishi, Satoshi

AU - Shoji, Shuichi

PY - 2014/9/1

Y1 - 2014/9/1

N2 - An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.

AB - An electrohydrodynamic (EHD) ion-drag micropump using three-dimensional carbon micromesh electrodes was developed. The carbon micromesh electrodes were created by the pyrolysis of SU-8 structures. The carbon electrodes and microchannel were formed on a quartz substrate, and the microchannel was sealed by an SU-8 slab structure. The pumping behaviors were evaluated using Fluorinert as a non-conductive sample solution. The maximum pressure and volume flow rate were approximately 23 Pa and 400 nL/min, respectively, under an applied voltage of 500 V.

KW - EHD micropump

KW - SU-8 pyrolysis

KW - carbon electrode

KW - micromesh

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Development of an electrohydrodynamic ion-drag micropump using three-dimensional carbon micromesh electrodes

Abstract

Keywords

ASJC Scopus subject areas

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