Development of standards for reliable surface analyses by ISO technical committee 201 on surface chemical analysis

C. J. Powell*, R. Shimizu, K. Yoshihara, S. Ichimura

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The need for reliable surface analyses together with quality-management requirements for analytical laboratories led the International Organization for Standardization (ISO) to formits Technical Committee (TC) 201 on Surface Chemical Analysis in 1991. This article describes the organization of TC 201, the strategies that have been found useful for identifying and assessing possible projects for new international standards, and the 57 international standards and other documents prepared to date by TC 201. Standards have now been developed for Auger-electron spectroscopy, glow-discharge spectroscopy, various types of scanning probe microscopy, secondary-ion mass spectrometry, sputter-depth profiling, total-reflection X-ray fluorescence spectroscopy, X-ray photoelectron spectroscopy, and X-ray reflectometry. In addition, standards have been developed with definitions of terms used in surface chemical analysis; the handling, preparation of specimens for surface analysis; information and data-transfer formats; and methods for determining the lateral resolution of beam-based methods of surface analysis.

Original languageEnglish
Pages (from-to)127-134
Number of pages8
JournalSurface and Interface Analysis
Issue number1
Publication statusPublished - 2015 Jan 1
Externally publishedYes


  • ISO/TC 201
  • International standards
  • Surface chemical analysis

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry


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