TY - JOUR
T1 - Development of the single ion beam induced charge (SIBIC) imaging technique using the single ion microprobe system
AU - Meishoku, Koh
AU - Ken-ichi, Hara
AU - Katsuyuki, Horita
AU - Bungo, Shigeta
AU - Takashi, Matsukawa
AU - Atsushi, Kishida
AU - Takashi, Tanii
AU - Makoto, Goto
AU - Iwao, Ohdomari
N1 - Funding Information:
This work is supported by a Grant-in-Aid for Specially Promoted Research, the Ministry of Education, Science and Culture.
PY - 1994/7/1
Y1 - 1994/7/1
N2 - In order to minimize image degradation of IBIC (ion beam induced charge) during observation, the single ion beam induced charge (SIBIC) imaging technique has been developed by using a single ion microprobe, which enables us to hit a particular site of a device with single ions one by one. With only five He single ions per pixel, we have succeeded in obtaining reasonable quality images of an active area of a device. Since the number of defects induced by five single ions is quite low, the irradiated device was still alive for subsequent process and device diagnoses.
AB - In order to minimize image degradation of IBIC (ion beam induced charge) during observation, the single ion beam induced charge (SIBIC) imaging technique has been developed by using a single ion microprobe, which enables us to hit a particular site of a device with single ions one by one. With only five He single ions per pixel, we have succeeded in obtaining reasonable quality images of an active area of a device. Since the number of defects induced by five single ions is quite low, the irradiated device was still alive for subsequent process and device diagnoses.
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U2 - 10.1016/0168-583X(94)95460-7
DO - 10.1016/0168-583X(94)95460-7
M3 - Article
AN - SCOPUS:43949158954
SN - 0168-583X
VL - 93
SP - 82
EP - 86
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 1
ER -