TY - JOUR
T1 - Diamond-like carbon films deposited without deposition particles of large incidence angles by sputtering
AU - Hoshi, Y.
AU - Suzuki, E.
AU - Osaka, T.
N1 - Funding Information:
This work was partially supported by a grant from Tokyo Ohka Faundation.
PY - 1997/12
Y1 - 1997/12
N2 - Deposition of diamond-like carbon (DLC) films at liquid nitrogen temperature (77 K) under the control of the angular distribution of depositing particles was attempted using a DC facing target sputtering system. The film deposited at 77 K, the liquid-nitrogen temperature, has a much higher density and higher hardness than the film deposited at room temperature. Removal of the depositing particles having high incidence angles was found to be effective for increasing the hardness of the film.
AB - Deposition of diamond-like carbon (DLC) films at liquid nitrogen temperature (77 K) under the control of the angular distribution of depositing particles was attempted using a DC facing target sputtering system. The film deposited at 77 K, the liquid-nitrogen temperature, has a much higher density and higher hardness than the film deposited at room temperature. Removal of the depositing particles having high incidence angles was found to be effective for increasing the hardness of the film.
KW - Self-shadowing effect
KW - Sputtering
KW - Thin films - diamond-like carbon
KW - Ultra-high hardness
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U2 - 10.1016/S0304-8853(97)00645-8
DO - 10.1016/S0304-8853(97)00645-8
M3 - Article
AN - SCOPUS:0031352294
SN - 0304-8853
VL - 176
SP - 51
EP - 55
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
IS - 1
ER -