DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE.

T. Nakano; Y. Kasama; Y. Ohki; K. Yahagi

DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE.

T. Nakano^*, Y. Kasama, Y. Ohki, K. Yahagi

^*Corresponding author for this work

School of Advanced Science and Engineering

Research output: Contribution to conference › Paper › peer-review

Abstract

Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.

Original language	English
Pages	81-84
Number of pages	4
Publication status	Published - 1984 Dec 1

ASJC Scopus subject areas

Engineering(all)

Cite this

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title = "DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE.",

abstract = "Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.",

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AU - Nakano, T.

AU - Kasama, Y.

AU - Ohki, Y.

AU - Yahagi, K.

PY - 1984/12/1

Y1 - 1984/12/1

N2 - Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.

AB - Effects of carrier gas on the structure and tan delta of plasma polymerized tetrafluoroethylene thin film were investigated. The structure of the films were studied by ESR, ESCA and IR. Films polymerized using hydrogen as a carrier gas are cross-linked to a higher degree and have more radicals than those polymerized using argon as a carrier gas. The former shows higher tan delta value than the latter. Radicals are considered to be polyene type in both two kinds of films.

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M3 - Paper

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ER -

DIELECTRIC PROPERTIES OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE.

Abstract

ASJC Scopus subject areas

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