Dielectric properties of plasma-polymerized tetrafluoroethylene films

Toshiki Nakano, Masao Fukuyama, Yoshimichi Ohki

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


A plasma-polymerized tetrafluoroethylene film has dielectric loss peaks below -50degC and approximately at 40degC. The effects of the substrate temperature during polymerization and of plasma irradiation after polymerization on the appearance of the peaks were studied. The low-temperature peak seems to be due to local-mode relaxation of polar groups, while the high-temperature peak seems to be due to phase transition.

Original languageEnglish
Pages (from-to)1042-1046
Number of pages5
JournalJapanese journal of applied physics
Issue number6R
Publication statusPublished - 1988 Jun


  • Dielectric properties
  • Local mode relaxation
  • Organic thin film
  • Phase transition
  • Plasma polymerization

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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