Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Daisuke Yamazaki; Toshitsugu Ueda

doi:10.1541/ieejsmas.130.65

Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Daisuke Yamazaki^*, Toshitsugu Ueda

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed.

Original language	English
Journal	IEEJ Transactions on Sensors and Micromachines
Volume	130
Issue number	3
DOIs	https://doi.org/10.1541/ieejsmas.130.65
Publication status	Published - 2010

Keywords

Hydrogen gas sensor
Lift-off process
MEMS
Platinum thin film

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering

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10.1541/ieejsmas.130.65

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abstract = "In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed.",

keywords = "Hydrogen gas sensor, Lift-off process, MEMS, Platinum thin film",

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AU - Yamazaki, Daisuke

AU - Ueda, Toshitsugu

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AB - In this paper, thermo-resistive platinum (Pt) thin film sensor, which was produced using Micro Electro Mechanical Systems (MEMS) fabrication techniques, is proposed. The sensor design incorporated resistor elements that would facilitate the temperature-resistance characteristics and mechanisms of Pt based thin film thermo-resistors. Especially, this paper reports the characteristics of a new differential Pt thin film hydrogen gas sensor. The fabricated hydrogen sensor detected the concentration of hydrogen gas in the air from 2% to 10%. It was possible to achieve the correct the heat transfer with this new differential Pt thin film hydrogen gas sensor. The characteristics of sensor's output are higher than conventional ones that we developed.

KW - Hydrogen gas sensor

KW - Lift-off process

KW - MEMS

KW - Platinum thin film

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Differential platinum thin film hydrogen gas sensor fabricated by MEMS techniques

Abstract

Keywords

ASJC Scopus subject areas

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