Abstract
In this paper, dimension optimization of supporting portion was carried out for an originally designed high-frequency fundamental AT-cut quartz resonator, which has a firstly applied peripheral electrode and 10-μm-thin vibration portion to generate above 150 MHz fundamental thickness-shear vibration. Using three-dimensional finite element modeling, it is the first time; dimensions of supporting portion were optimized through improving energy trapping and reducing vibration couplings. Based on optimization results, resonators with different dimensions were fabricated and their Q-factors were measured. The experimental results were very consistent with the optimization results. Improvement of the resonator's performance ensured the validation of our method.
| Original language | English |
|---|---|
| Pages (from-to) | 253-259 |
| Number of pages | 7 |
| Journal | IEEJ Transactions on Sensors and Micromachines |
| Volume | 133 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2013 |
Keywords
- Coupling
- Energy trapping
- Finite element method
- High-frequency resonator
- Optimization
- Supporting portion
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Mechanical Engineering