DIRECT ENGRAVING ON POSITIVE RESISTS BY SYNCHROTRON RADIATION.

S. Ichimura*, M. Hirata, H. Tanino, N. Atoda, M. Ono, K. Hoh

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

14 Citations (Scopus)

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Physics & Astronomy

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