Fingerprint
Dive into the research topics of 'Effects of additives on copper electrodeposition in submicrometer trenches'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effects of additives on copper electrodeposition in submicrometer trenches
Madoka Hasegawa*, Yoshinori Negishi, Takuya Nakanishi, Tetsuya Osaka
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
98
Citations
(Scopus)