Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor

Yumi Hayashi; Hiroaki Yamazaki; Kei Masunishi; Tamio Ikehashi; Naofumi Nakamura; Akihiro Kojima

doi:10.1016/j.ijhydene.2019.10.245

Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor

Yumi Hayashi^*, Hiroaki Yamazaki, Kei Masunishi, Tamio Ikehashi, Naofumi Nakamura, Akihiro Kojima

^*Corresponding author for this work

Graduate School of Information, Production and Systems

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

We investigated the effects of poisoning and restoration of PdCuSi-metallic glass (MG), which is a sensing material that offers low power consumption and fast response times when used in capacitive MEMS hydrogen sensors. Four poisoning gases were used: hexamethyldisilazane (HMDS), H₂S, SO₂, and NO₂. Exposure to H₂S resulted in metal sulfide forming at the surface of the PdCuSi-MG, although the sulfur did not diffuse into the PdCuSi-MG. Exposure to NO₂ only resulted in the nitrogen being adsorbed without bonding to metals. The poisoning elements were desorbed by heating. Exposure to H₂S and SO₂ degraded the hydrogen sensitivity in terms of resistance of the PdCuSi-MG, although exposure to HMDS and NO₂ only slowed down the response time. These degradations were recovered by heating. We next examined forming a refresher layer under PdCuSi-MG in a hydrogen sensor. The hydrogen sensitivity of the H₂S-exposed hydrogen sensor was restored by performing a refresh operation for a few minutes.

Original language	English
Pages (from-to)	1187-1194
Number of pages	8
Journal	International Journal of Hydrogen Energy
Volume	45
Issue number	1
DOIs	https://doi.org/10.1016/j.ijhydene.2019.10.245
Publication status	Published - 2020 Jan 1

Keywords

Hydrogen sensor
Metallic glass
PdCuSi
Poisoning
Refresher
Sulfur

ASJC Scopus subject areas

Renewable Energy, Sustainability and the Environment
Fuel Technology
Condensed Matter Physics
Energy Engineering and Power Technology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1016/j.ijhydene.2019.10.245

Cite this

@article{50140247eccb46f2bf2914b392246d0c,

title = "Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor",

abstract = "We investigated the effects of poisoning and restoration of PdCuSi-metallic glass (MG), which is a sensing material that offers low power consumption and fast response times when used in capacitive MEMS hydrogen sensors. Four poisoning gases were used: hexamethyldisilazane (HMDS), H2S, SO2, and NO2. Exposure to H2S resulted in metal sulfide forming at the surface of the PdCuSi-MG, although the sulfur did not diffuse into the PdCuSi-MG. Exposure to NO2 only resulted in the nitrogen being adsorbed without bonding to metals. The poisoning elements were desorbed by heating. Exposure to H2S and SO2 degraded the hydrogen sensitivity in terms of resistance of the PdCuSi-MG, although exposure to HMDS and NO2 only slowed down the response time. These degradations were recovered by heating. We next examined forming a refresher layer under PdCuSi-MG in a hydrogen sensor. The hydrogen sensitivity of the H2S-exposed hydrogen sensor was restored by performing a refresh operation for a few minutes.",

keywords = "Hydrogen sensor, Metallic glass, PdCuSi, Poisoning, Refresher, Sulfur",

author = "Yumi Hayashi and Hiroaki Yamazaki and Kei Masunishi and Tamio Ikehashi and Naofumi Nakamura and Akihiro Kojima",

note = "Funding Information: Device fabrication for this research was supported by Japan Semiconductor Corporation . We are grateful to the personnel at the company who supported us. A part of this work was conducted at the AIST Nano-Processing Facility, supported by “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT) , Japan. The authors would also like to thank Tomohiro Saito and Daiki Ono for their support with the development, and Hideki Shibata and Yoshiaki Sugizaki for their continuous support and encouragement. Publisher Copyright: {\textcopyright} 2019 Hydrogen Energy Publications LLC",

year = "2020",

month = jan,

day = "1",

doi = "10.1016/j.ijhydene.2019.10.245",

language = "English",

volume = "45",

pages = "1187--1194",

journal = "International Journal of Hydrogen Energy",

issn = "0360-3199",

publisher = "Elsevier Limited",

number = "1",

}

TY - JOUR

T1 - Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor

AU - Hayashi, Yumi

AU - Yamazaki, Hiroaki

AU - Masunishi, Kei

AU - Ikehashi, Tamio

AU - Nakamura, Naofumi

AU - Kojima, Akihiro

N1 - Funding Information: Device fabrication for this research was supported by Japan Semiconductor Corporation . We are grateful to the personnel at the company who supported us. A part of this work was conducted at the AIST Nano-Processing Facility, supported by “Nanotechnology Platform Program” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT) , Japan. The authors would also like to thank Tomohiro Saito and Daiki Ono for their support with the development, and Hideki Shibata and Yoshiaki Sugizaki for their continuous support and encouragement. Publisher Copyright: © 2019 Hydrogen Energy Publications LLC

PY - 2020/1/1

Y1 - 2020/1/1

N2 - We investigated the effects of poisoning and restoration of PdCuSi-metallic glass (MG), which is a sensing material that offers low power consumption and fast response times when used in capacitive MEMS hydrogen sensors. Four poisoning gases were used: hexamethyldisilazane (HMDS), H2S, SO2, and NO2. Exposure to H2S resulted in metal sulfide forming at the surface of the PdCuSi-MG, although the sulfur did not diffuse into the PdCuSi-MG. Exposure to NO2 only resulted in the nitrogen being adsorbed without bonding to metals. The poisoning elements were desorbed by heating. Exposure to H2S and SO2 degraded the hydrogen sensitivity in terms of resistance of the PdCuSi-MG, although exposure to HMDS and NO2 only slowed down the response time. These degradations were recovered by heating. We next examined forming a refresher layer under PdCuSi-MG in a hydrogen sensor. The hydrogen sensitivity of the H2S-exposed hydrogen sensor was restored by performing a refresh operation for a few minutes.

AB - We investigated the effects of poisoning and restoration of PdCuSi-metallic glass (MG), which is a sensing material that offers low power consumption and fast response times when used in capacitive MEMS hydrogen sensors. Four poisoning gases were used: hexamethyldisilazane (HMDS), H2S, SO2, and NO2. Exposure to H2S resulted in metal sulfide forming at the surface of the PdCuSi-MG, although the sulfur did not diffuse into the PdCuSi-MG. Exposure to NO2 only resulted in the nitrogen being adsorbed without bonding to metals. The poisoning elements were desorbed by heating. Exposure to H2S and SO2 degraded the hydrogen sensitivity in terms of resistance of the PdCuSi-MG, although exposure to HMDS and NO2 only slowed down the response time. These degradations were recovered by heating. We next examined forming a refresher layer under PdCuSi-MG in a hydrogen sensor. The hydrogen sensitivity of the H2S-exposed hydrogen sensor was restored by performing a refresh operation for a few minutes.

KW - Hydrogen sensor

KW - Metallic glass

KW - PdCuSi

KW - Poisoning

KW - Refresher

KW - Sulfur

UR - http://www.scopus.com/inward/record.url?scp=85076248985&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85076248985&partnerID=8YFLogxK

U2 - 10.1016/j.ijhydene.2019.10.245

DO - 10.1016/j.ijhydene.2019.10.245

M3 - Article

AN - SCOPUS:85076248985

SN - 0360-3199

VL - 45

SP - 1187

EP - 1194

JO - International Journal of Hydrogen Energy

JF - International Journal of Hydrogen Energy

IS - 1

ER -

Effects of poisoning gases on and restoration of PdCuSi metallic glass in a capacitive MEMS hydrogen sensor

Abstract

Keywords

ASJC Scopus subject areas

UN SDGs

Access to Document

Other files and links

Fingerprint

Cite this