Efficient si planar doping in GaAs by flow-rate modulation epitaxy

Naoki Kobayashi, Toshiki Makimoto, Yoshiji Horikoshi

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)


During the growth of GaAs layers by flow-rate modulation epitaxy (FME), triethyl gallium and arsine are alternately supplied on the GaAs substrate. Thus, the Ga atomic surface and As atomic surface appear alternately at the growing surface. These atomic surfaces exhibit very different characteristics in capturing impurity atoms. By supplying 10% silane diluted with hydrogen gas at a flow-rate of 20 cc/min for one second, we have succeeded in obtaining extremely high Si planar doping levels with the maximum sheet carrier density of 1.1 X 1013 cm-2 occurring at the low growth temperature of 550°C.

Original languageEnglish
Pages (from-to)L746-L748
JournalJapanese journal of applied physics
Issue number9
Publication statusPublished - 1986 Sept
Externally publishedYes

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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