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Electrical and structural properties of Al and B implanted 4H-SiC
Y. Tanaka*, Naoto Kobayashi, H. Okumura, R. Suzuki, T. Ohdaira, M. Hasegawa, M. Ogura, S. Yoshida, H. Tanoue
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Chapter
7
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(Scopus)