TY - GEN
T1 - Electrically driven varifocal micro lens fabricated by depositing parylene directly on liquid
AU - Nguyen, Binh Khiem
AU - Iwase, Eiji
AU - Matsumoto, Kiyoshi
AU - Shimoyama, Isao
PY - 2007
Y1 - 2007
N2 - The design and fabrication process of an electrically-driven varifocal liquid microlens are reported with experimental measurement results and a theoretical calculation model. Droplets of oil are sandwitched between a glass wafer and a thin-film of parylene chemical vapor deposited (CVD) directly onto the droplets' liquid surface. A method for creating fluid-filled micro chambers was realized with two core steps: 1) placing-shaping of oil drop-lets with hydrophobic/hydrophilic patterns and 2) coating them with a thin CVD parylene film in high vacuum condition. Liquid lenses and lens arrays of diameter from 20μm to 10mm were fabricated. In the tuning experiment, focal length was shortened to 20% of its initial value, from 3.8mm to 0.8mm. The values calculated from model match the data collected from experiments within the range of applied voltage from 0V to 150V.
AB - The design and fabrication process of an electrically-driven varifocal liquid microlens are reported with experimental measurement results and a theoretical calculation model. Droplets of oil are sandwitched between a glass wafer and a thin-film of parylene chemical vapor deposited (CVD) directly onto the droplets' liquid surface. A method for creating fluid-filled micro chambers was realized with two core steps: 1) placing-shaping of oil drop-lets with hydrophobic/hydrophilic patterns and 2) coating them with a thin CVD parylene film in high vacuum condition. Liquid lenses and lens arrays of diameter from 20μm to 10mm were fabricated. In the tuning experiment, focal length was shortened to 20% of its initial value, from 3.8mm to 0.8mm. The values calculated from model match the data collected from experiments within the range of applied voltage from 0V to 150V.
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M3 - Conference contribution
AN - SCOPUS:43349107107
SN - 1424409519
SN - 9781424409518
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 305
EP - 308
BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Y2 - 21 January 2007 through 25 January 2007
ER -