Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

Takahiko Yanagitani; Masato Kiuchi; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/ULTSYM.2006.368

Electromechanical coupling coefficient k₁₅ and crystallites alignment of (112̄0) textured Zno films

Takahiko Yanagitani^*, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Citations (Scopus)

Abstract

Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k₁₅ of the (112̄0) textured ZnO films.

Original language	English
Title of host publication	2006 IEEE International Ultrasonics Symposium, IUS
Pages	1463-1466
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2006.368
Publication status	Published - 2006 Dec 1
Externally published	Yes

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
Volume	1
ISSN (Print)	1051-0117

Keywords

(11-20) textured ZnO film
Pure-shear mode film bulk acoustic resonator
RF magnetron sputtering
Shear mode electromechanical coupling coefficient k

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2006.368

Cite this

Electromechanical coupling coefficient k₁₅ and crystallites alignment of (112̄0) textured Zno films. / Yanagitani, Takahiko; Kiuchi, Masato; Matsukawa, Mami et al.
2006 IEEE International Ultrasonics Symposium, IUS. 2006. p. 1463-1466 4152224 (Proceedings - IEEE Ultrasonics Symposium; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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