Electromechanical coupling coefficient k15 and crystallites alignment of (112̄0) textured Zno films

Takahiko Yanagitani*, Masato Kiuchi, Mami Matsukawa, Yoshiaki Watanabe

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)


Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionallly aligned ((112̄0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112̄0) textured ZnO films.

Original languageEnglish
Title of host publication2006 IEEE International Ultrasonics Symposium, IUS
Number of pages4
Publication statusPublished - 2006 Dec 1
Externally publishedYes

Publication series

NameProceedings - IEEE Ultrasonics Symposium
ISSN (Print)1051-0117


  • (11-20) textured ZnO film
  • Pure-shear mode film bulk acoustic resonator
  • RF magnetron sputtering
  • Shear mode electromechanical coupling coefficient k

ASJC Scopus subject areas

  • Acoustics and Ultrasonics


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