Electromechanical coupling coefficient k15 of (112̄0) textured ZnO films

Takahiko Yanagitani; Natsuki Mishima; Mami Matsukawa; Yoshiaki Watanabe

doi:10.1109/ULTSYM.2005.1603223

Electromechanical coupling coefficient k₁₅ of (112̄0) textured ZnO films

Takahiko Yanagitani^*, Natsuki Mishima, Mami Matsukawa, Yoshiaki Watanabe

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The ZnO film, whose crystallites c-axis align parallel to the substrate plane [(112̄0) textured ZnO films], has many potential advantages as shear-mode piezoelectric devices. In this study, shear mode electromechanical coupling coefficient k₁₅ of (112̄0) textured polycrystalline ZnO films was estimated. An over-moded resonator consists of metal electrode film / (112̄0) textured ZnO piezoelectric film / metal electrode film / silica glass substrate was used to characterize k₁₅ by a resonant spectrum method. For example, the (1120) textured ZnO piezoelectric films with good crystallite alignment show an electromechanical coupling coefficient k ₁₅ of 0.24 which is 92% of the value of single-crystalline (k ₁₅ = 0.26).

Original language	English
Title of host publication	2005 IEEE Ultrasonics Symposium
Pages	1824-1827
Number of pages	4
DOIs	https://doi.org/10.1109/ULTSYM.2005.1603223
Publication status	Published - 2005 Dec 1
Externally published	Yes
Event	2005 IEEE Ultrasonics Symposium - Rotterdam, Netherlands Duration: 2005 Sept 18 → 2005 Sept 21

Publication series

Name	Proceedings - IEEE Ultrasonics Symposium
Volume	3
ISSN (Print)	1051-0117

Other

Other	2005 IEEE Ultrasonics Symposium
Country/Territory	Netherlands
City	Rotterdam
Period	05/9/18 → 05/9/21

Keywords

(11-20) textured ZnO piezoelectric films
Electromechnical coupling coefficient
Shear mode FBAR

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/ULTSYM.2005.1603223

Cite this

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title = "Electromechanical coupling coefficient k15 of (11{\=2}0) textured ZnO films",

abstract = "The ZnO film, whose crystallites c-axis align parallel to the substrate plane [(11{\=2}0) textured ZnO films], has many potential advantages as shear-mode piezoelectric devices. In this study, shear mode electromechanical coupling coefficient k15 of (11{\=2}0) textured polycrystalline ZnO films was estimated. An over-moded resonator consists of metal electrode film / (11{\=2}0) textured ZnO piezoelectric film / metal electrode film / silica glass substrate was used to characterize k15 by a resonant spectrum method. For example, the (1120) textured ZnO piezoelectric films with good crystallite alignment show an electromechanical coupling coefficient k 15 of 0.24 which is 92% of the value of single-crystalline (k 15 = 0.26).",

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author = "Takahiko Yanagitani and Natsuki Mishima and Mami Matsukawa and Yoshiaki Watanabe",

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N2 - The ZnO film, whose crystallites c-axis align parallel to the substrate plane [(112̄0) textured ZnO films], has many potential advantages as shear-mode piezoelectric devices. In this study, shear mode electromechanical coupling coefficient k15 of (112̄0) textured polycrystalline ZnO films was estimated. An over-moded resonator consists of metal electrode film / (112̄0) textured ZnO piezoelectric film / metal electrode film / silica glass substrate was used to characterize k15 by a resonant spectrum method. For example, the (1120) textured ZnO piezoelectric films with good crystallite alignment show an electromechanical coupling coefficient k 15 of 0.24 which is 92% of the value of single-crystalline (k 15 = 0.26).

AB - The ZnO film, whose crystallites c-axis align parallel to the substrate plane [(112̄0) textured ZnO films], has many potential advantages as shear-mode piezoelectric devices. In this study, shear mode electromechanical coupling coefficient k15 of (112̄0) textured polycrystalline ZnO films was estimated. An over-moded resonator consists of metal electrode film / (112̄0) textured ZnO piezoelectric film / metal electrode film / silica glass substrate was used to characterize k15 by a resonant spectrum method. For example, the (1120) textured ZnO piezoelectric films with good crystallite alignment show an electromechanical coupling coefficient k 15 of 0.24 which is 92% of the value of single-crystalline (k 15 = 0.26).

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