Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

Ryoh Miyamoto; N. Binh-Khiem; E. Iwase; K. Matsumoto; I. Shimoyama

doi:10.1109/SENSOR.2009.5285855

Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

Ryoh Miyamoto^*, N. Binh-Khiem, E. Iwase, K. Matsumoto, I. Shimoyama

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

Original language	English
Title of host publication	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages	1365-1368
Number of pages	4
DOIs	https://doi.org/10.1109/SENSOR.2009.5285855
Publication status	Published - 2009 Dec 14
Externally published	Yes
Event	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 2009 Jun 21 → 2009 Jun 25

Publication series

Name	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference

Conference	TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Country/Territory	United States
City	Denver, CO
Period	09/6/21 → 09/6/25

Keywords

Chemical vapor deposition
Ellipsoidal lens
Liquid lens
Parylene

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/SENSOR.2009.5285855

Cite this

Miyamoto, R., Binh-Khiem, N., Iwase, E., Matsumoto, K., & Shimoyama, I. (2009). Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 1365-1368). [5285855] (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). https://doi.org/10.1109/SENSOR.2009.5285855

Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. / Miyamoto, Ryoh; Binh-Khiem, N.; Iwase, E. et al.
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1365-1368 5285855 (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Miyamoto, R, Binh-Khiem, N, Iwase, E, Matsumoto, K & Shimoyama, I 2009, Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. in TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems., 5285855, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, pp. 1365-1368, TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Denver, CO, United States, 09/6/21. https://doi.org/10.1109/SENSOR.2009.5285855

Miyamoto R, Binh-Khiem N, Iwase E, Matsumoto K, Shimoyama I. Ellipsoidal micro lens fabricated by depositing parylene directly on liquid. In TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems. 2009. p. 1365-1368. 5285855. (TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems). doi: 10.1109/SENSOR.2009.5285855

@inproceedings{9c742c55a12d4aa1a0791aab3d24fed2,

title = "Ellipsoidal micro lens fabricated by depositing parylene directly on liquid",

abstract = "We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.",

keywords = "Chemical vapor deposition, Ellipsoidal lens, Liquid lens, Parylene",

author = "Ryoh Miyamoto and N. Binh-Khiem and E. Iwase and K. Matsumoto and I. Shimoyama",

year = "2009",

month = dec,

day = "14",

doi = "10.1109/SENSOR.2009.5285855",

language = "English",

isbn = "9781424441938",

series = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

pages = "1365--1368",

booktitle = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems",

note = "TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems ; Conference date: 21-06-2009 Through 25-06-2009",

}

TY - GEN

T1 - Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

AU - Miyamoto, Ryoh

AU - Binh-Khiem, N.

AU - Iwase, E.

AU - Matsumoto, K.

AU - Shimoyama, I.

PY - 2009/12/14

Y1 - 2009/12/14

N2 - We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

AB - We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 μl in volume on hydrophilic elliptical domains with 5.00mm major diameter and 2.50mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.

KW - Chemical vapor deposition

KW - Ellipsoidal lens

KW - Liquid lens

KW - Parylene

UR - http://www.scopus.com/inward/record.url?scp=71549138072&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=71549138072&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2009.5285855

DO - 10.1109/SENSOR.2009.5285855

M3 - Conference contribution

AN - SCOPUS:71549138072

SN - 9781424441938

T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

SP - 1365

EP - 1368

BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Y2 - 21 June 2009 through 25 June 2009

ER -

Ellipsoidal micro lens fabricated by depositing parylene directly on liquid

Abstract

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Keywords

ASJC Scopus subject areas

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