Rozkład energii napre{ogonek}żeń resztkowych w strukturach dwuwarstwowych

Yury Zimin; Toshitsugu Ueda; Joanna Pawłat

Rozkład energii napre{ogonek}żeń resztkowych w strukturach dwuwarstwowych

Translated title of the contribution: Energy distribution of residual stresses in bi-layer structure

Yury Zimin^*, Toshitsugu Ueda, Joanna Pawłat

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The analysis of energy of elastic strain induced by the residual stresses in bonded structure in the framework of Timoshenko's model has been done. The analysis revealed the energy is due to the forces aimed at splitting the structure. The energy as well as the splitting forces strongly depended on the thickness ratio of the bonded layers and the total thickness of the structure. The dependence included the point where splitting forces were equal zero (E ₁h ₁ ² = E ₂h ₂ ²). The latter allows reducing the debonding problem, often appearing in the case of bonded structures of dissimilar materials, which becomes peculiarly important in micro and nanofabrication processes.

Translated title of the contribution	Energy distribution of residual stresses in bi-layer structure
Original language	Undefined/Unknown
Pages (from-to)	111-113
Number of pages	3
Journal	Przeglad Elektrotechniczny
Volume	88
Issue number	6
Publication status	Published - 2012

Keywords

Bonding
Crystal quartz
Residual stress
Silicon
Surface processing
Thin surface coatings

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

@article{2e2534e72a184e80bc18914bd1d2d227,

title = "Rozk{\l}ad energii napre{ogonek}{\.z}e{\'n} resztkowych w strukturach dwuwarstwowych",

abstract = "The analysis of energy of elastic strain induced by the residual stresses in bonded structure in the framework of Timoshenko's model has been done. The analysis revealed the energy is due to the forces aimed at splitting the structure. The energy as well as the splitting forces strongly depended on the thickness ratio of the bonded layers and the total thickness of the structure. The dependence included the point where splitting forces were equal zero (E 1h 1 2 = E 2h 2 2). The latter allows reducing the debonding problem, often appearing in the case of bonded structures of dissimilar materials, which becomes peculiarly important in micro and nanofabrication processes.",

keywords = "Bonding, Crystal quartz, Residual stress, Silicon, Surface processing, Thin surface coatings",

author = "Yury Zimin and Toshitsugu Ueda and Joanna Paw{\l}at",

year = "2012",

language = "Undefined/Unknown",

volume = "88",

pages = "111--113",

journal = "Przeglad Elektrotechniczny",

issn = "0033-2097",

publisher = "Wydawnictwo SIGMA - N O T Sp. z o.o.",

number = "6",

}

TY - JOUR

T1 - Rozkład energii napre{ogonek}żeń resztkowych w strukturach dwuwarstwowych

AU - Zimin, Yury

AU - Ueda, Toshitsugu

AU - Pawłat, Joanna

PY - 2012

Y1 - 2012

N2 - The analysis of energy of elastic strain induced by the residual stresses in bonded structure in the framework of Timoshenko's model has been done. The analysis revealed the energy is due to the forces aimed at splitting the structure. The energy as well as the splitting forces strongly depended on the thickness ratio of the bonded layers and the total thickness of the structure. The dependence included the point where splitting forces were equal zero (E 1h 1 2 = E 2h 2 2). The latter allows reducing the debonding problem, often appearing in the case of bonded structures of dissimilar materials, which becomes peculiarly important in micro and nanofabrication processes.

AB - The analysis of energy of elastic strain induced by the residual stresses in bonded structure in the framework of Timoshenko's model has been done. The analysis revealed the energy is due to the forces aimed at splitting the structure. The energy as well as the splitting forces strongly depended on the thickness ratio of the bonded layers and the total thickness of the structure. The dependence included the point where splitting forces were equal zero (E 1h 1 2 = E 2h 2 2). The latter allows reducing the debonding problem, often appearing in the case of bonded structures of dissimilar materials, which becomes peculiarly important in micro and nanofabrication processes.

KW - Bonding

KW - Crystal quartz

KW - Residual stress

KW - Silicon

KW - Surface processing

KW - Thin surface coatings

UR - http://www.scopus.com/inward/record.url?scp=84861899119&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84861899119&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:84861899119

SN - 0033-2097

VL - 88

SP - 111

EP - 113

JO - Przeglad Elektrotechniczny

JF - Przeglad Elektrotechniczny

IS - 6

ER -

Rozkład energii napre{ogonek}żeń resztkowych w strukturach dwuwarstwowych

Abstract

Keywords

ASJC Scopus subject areas

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