Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

Zilong Zhang; Liwen Sang; Jian Huang; Waiyan Chen; Linjun Wang; Yukiko Takahashi; Seiji Mitani; Yasuo Koide; Satoshi Koizumi; Meiyong Liao

doi:10.1016/j.carbon.2020.08.049

Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

Zilong Zhang, Liwen Sang, Jian Huang, Waiyan Chen, Linjun Wang, Yukiko Takahashi, Seiji Mitani, Yasuo Koide, Satoshi Koizumi, Meiyong Liao^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

11 Citations (Scopus)

Abstract

The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.

Original language	English
Pages (from-to)	294-301
Number of pages	8
Journal	Carbon
Volume	170
DOIs	https://doi.org/10.1016/j.carbon.2020.08.049
Publication status	Published - 2020 Dec
Externally published	Yes

Keywords

Diamond
MEMS
Magnetic sensors

ASJC Scopus subject areas

Chemistry(all)
Materials Science(all)

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10.1016/j.carbon.2020.08.049

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@article{ee2e281b18a34ea7a4770112ed4edd2c,

title = "Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film",

abstract = "The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.",

keywords = "Diamond, MEMS, Magnetic sensors",

author = "Zilong Zhang and Liwen Sang and Jian Huang and Waiyan Chen and Linjun Wang and Yukiko Takahashi and Seiji Mitani and Yasuo Koide and Satoshi Koizumi and Meiyong Liao",

note = "Funding Information: This work was partially supported by JSPS KAKENHI (Grant Number 20H02212 , 15H03999 ), Tsukuba Global Innovation Promotion Agency, Science and National Natural Science Foundation of China (Grant Number 11875186 ) and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan . The authors also gratefully thanked financial support from China Scholarship Council. Publisher Copyright: {\textcopyright} 2020 Elsevier Ltd",

year = "2020",

month = dec,

doi = "10.1016/j.carbon.2020.08.049",

language = "English",

volume = "170",

pages = "294--301",

journal = "Carbon",

issn = "0008-6223",

publisher = "Elsevier Limited",

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TY - JOUR

T1 - Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

AU - Zhang, Zilong

AU - Sang, Liwen

AU - Huang, Jian

AU - Chen, Waiyan

AU - Wang, Linjun

AU - Takahashi, Yukiko

AU - Mitani, Seiji

AU - Koide, Yasuo

AU - Koizumi, Satoshi

AU - Liao, Meiyong

N1 - Funding Information: This work was partially supported by JSPS KAKENHI (Grant Number 20H02212 , 15H03999 ), Tsukuba Global Innovation Promotion Agency, Science and National Natural Science Foundation of China (Grant Number 11875186 ) and Nanotechnology Platform projects sponsored by the Ministry of Education, Culture, Sports, and Technology (MEXT) of Japan . The authors also gratefully thanked financial support from China Scholarship Council. Publisher Copyright: © 2020 Elsevier Ltd

PY - 2020/12

Y1 - 2020/12

N2 - The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.

AB - The coupling of single crystal diamond (SCD) micro-electromechanical systems (MEMS) through with a functional hetero-material provides the strategy to develop diamond MEMS sensors. Here a noncontact magnetic sensor based on SCD MEMS resonance system functionalized with a boron-doped FeGa (FeGaB) thin film owning excellent magneto-strictive properties on diamond is demonstrated to improve the magnetic sensitivity. The amorphous FeGaB thin film is beneficial for high magnetic sensing performance. The FeGaB/Ti/SCD MEMS magnetic sensor exhibits magnetic sensitivity of as high as 152.1 Hz/mT, which is over four times of those of FeGa/Ti/SCD MEMS magnetic sensors. The derivative of the Young's modulus change with magnetic field (dE/dH) reaches a maximum value of 4.5 GPa/mT at 1.77 mT. By tailoring the magnetic properties with impurity dopant, one can markedly improve the sensitivity of the diamond MEMS magnetic sensitivity toward satisfying the figure-of-merits of ultra-high sensitivity, low noise level and high-reliability magnetic field operation.

KW - Diamond

KW - MEMS

KW - Magnetic sensors

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Enhanced magnetic sensing performance of diamond MEMS magnetic sensor with boron-doped FeGa film

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