Enhancement of GHz electromechanical coupling coefficient kt2of MgZnO and CaZnO thin film BAW resonators

Kota Izumi; Takahiko Yanagitani

doi:10.1109/IUS46767.2020.9251624

Enhancement of GHz electromechanical coupling coefficient kt₂of MgZnO and CaZnO thin film BAW resonators

Kota Izumi, Takahiko Yanagitani

School of Advanced Science and Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Electromechanical coupling coefficient kt2 of MgZnO and CaZnO thin films in the UHF frequency ranges have not been reported. In this study, the relationship between kt2 and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity VL of the MgZnO and CaZnO thin films was estimated. It has been found that kt2 and VL of MgZnO increases with increasing Mg concentration. With respect to CaZnO, {k{mathrm{t}}}-{2} increases, whereas VL decreases with increasing Ca concentration.

Original language	English
Title of host publication	IUS 2020 - International Ultrasonics Symposium, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781728154480
DOIs	https://doi.org/10.1109/IUS46767.2020.9251624
Publication status	Published - 2020 Sept 7
Event	2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States Duration: 2020 Sept 7 → 2020 Sept 11

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2020-September
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/Territory	United States
City	Las Vegas
Period	20/9/7 → 20/9/11

Keywords

Electromechanical coupling
Longitudinal wave velocity
Piezoelectric material

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/IUS46767.2020.9251624

Cite this

Enhancement of GHz electromechanical coupling coefficient kt₂of MgZnO and CaZnO thin film BAW resonators. / Izumi, Kota; Yanagitani, Takahiko.
IUS 2020 - International Ultrasonics Symposium, Proceedings. IEEE Computer Society, 2020. 9251624 (IEEE International Ultrasonics Symposium, IUS; Vol. 2020-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Izumi, K & Yanagitani, T 2020, Enhancement of GHz electromechanical coupling coefficient kt₂of MgZnO and CaZnO thin film BAW resonators. in IUS 2020 - International Ultrasonics Symposium, Proceedings., 9251624, IEEE International Ultrasonics Symposium, IUS, vol. 2020-September, IEEE Computer Society, 2020 IEEE International Ultrasonics Symposium, IUS 2020, Las Vegas, United States, 20/9/7. https://doi.org/10.1109/IUS46767.2020.9251624

@inproceedings{8b4afcb6dec740199396caac551e27c8,

title = "Enhancement of GHz electromechanical coupling coefficient kt2of MgZnO and CaZnO thin film BAW resonators",

abstract = "Electromechanical coupling coefficient kt2 of MgZnO and CaZnO thin films in the UHF frequency ranges have not been reported. In this study, the relationship between kt2 and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity VL of the MgZnO and CaZnO thin films was estimated. It has been found that kt2 and VL of MgZnO increases with increasing Mg concentration. With respect to CaZnO, {k{mathrm{t}}}-{2} increases, whereas VL decreases with increasing Ca concentration.",

keywords = "Electromechanical coupling, Longitudinal wave velocity, Piezoelectric material",

author = "Kota Izumi and Takahiko Yanagitani",

note = "Funding Information: ACKNOWLEDGMENT This work was supported by the JST CRESTO (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037). Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference date: 07-09-2020 Through 11-09-2020",

year = "2020",

month = sep,

day = "7",

doi = "10.1109/IUS46767.2020.9251624",

language = "English",

series = "IEEE International Ultrasonics Symposium, IUS",

publisher = "IEEE Computer Society",

booktitle = "IUS 2020 - International Ultrasonics Symposium, Proceedings",

}

TY - GEN

T1 - Enhancement of GHz electromechanical coupling coefficient kt2of MgZnO and CaZnO thin film BAW resonators

AU - Izumi, Kota

AU - Yanagitani, Takahiko

N1 - Funding Information: ACKNOWLEDGMENT This work was supported by the JST CRESTO (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037). Publisher Copyright: © 2020 IEEE.

PY - 2020/9/7

Y1 - 2020/9/7

N2 - Electromechanical coupling coefficient kt2 of MgZnO and CaZnO thin films in the UHF frequency ranges have not been reported. In this study, the relationship between kt2 and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity VL of the MgZnO and CaZnO thin films was estimated. It has been found that kt2 and VL of MgZnO increases with increasing Mg concentration. With respect to CaZnO, {k{mathrm{t}}}-{2} increases, whereas VL decreases with increasing Ca concentration.

AB - Electromechanical coupling coefficient kt2 of MgZnO and CaZnO thin films in the UHF frequency ranges have not been reported. In this study, the relationship between kt2 and dopant concentration of MgZnO and CaZnO thin films was investigated. In addition, longitudinal wave velocity VL of the MgZnO and CaZnO thin films was estimated. It has been found that kt2 and VL of MgZnO increases with increasing Mg concentration. With respect to CaZnO, {k{mathrm{t}}}-{2} increases, whereas VL decreases with increasing Ca concentration.

KW - Electromechanical coupling

KW - Longitudinal wave velocity

KW - Piezoelectric material

UR - http://www.scopus.com/inward/record.url?scp=85097886683&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85097886683&partnerID=8YFLogxK

U2 - 10.1109/IUS46767.2020.9251624

DO - 10.1109/IUS46767.2020.9251624

M3 - Conference contribution

AN - SCOPUS:85097886683

T3 - IEEE International Ultrasonics Symposium, IUS

BT - IUS 2020 - International Ultrasonics Symposium, Proceedings

PB - IEEE Computer Society

T2 - 2020 IEEE International Ultrasonics Symposium, IUS 2020

Y2 - 7 September 2020 through 11 September 2020

ER -