TY - JOUR
T1 - Enhancement of leaky surface acoustic wave harmonics excitation using bonded dissimilar-material structures
AU - Asakawa, Shiori
AU - Suzuki, Masashi
AU - Kakio, Shoji
AU - Tezuka, Ami
AU - Mizuno, Jun
N1 - Funding Information:
The authors thank Mr. Kazuhito Kishida and all the people of the Japan Steel Works, Ltd., who helped in fabricating the structure bonded to a quartz substrate. This work was supported by JSPS Grant-in-Aid for Scientific Research (B) Nos. 17H03233 and 20H02181.
Publisher Copyright:
© 2021 The Japan Society of Applied Physics.
PY - 2021/7
Y1 - 2021/7
N2 - The enhancement of high-order surface acoustic wave (SAW) harmonics by increasing the metallization ratio was theoretically and experimentally investigated in high-performance bonded dissimilar-material structures. The simulation using a finite element method for 36°Y-cut X-propagating LiTaO3 (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) and 27°YX-LiNbO3/AT90°X-quartz was performed by setting the metallization ratio of the interdigital transducer to a/p = 0.8 (a: electrode width, p: pitch), and the LT and LN thin-plate thicknesses to h/λ = 0.05 (λ: wavelength) and 0.1, respectively. The fractional bandwidths for 36°YX-LT/AT90°X-quartz and 27°YX-LN/AT90°X-quartz were obtained to be 1.6% and 4.0%, respectively, which were larger than those for single LT and LN. For a leaky SAW (LSAW) resonator with a/p = 0.8 fabricated on 36°YX-LT/AT0°X-quartz, the resonance properties and temperature coefficient of frequency of LSAW fundamental waves and harmonics were measured. The measured fractional bandwidth increased from 0.8% to 1.4% for single LT.
AB - The enhancement of high-order surface acoustic wave (SAW) harmonics by increasing the metallization ratio was theoretically and experimentally investigated in high-performance bonded dissimilar-material structures. The simulation using a finite element method for 36°Y-cut X-propagating LiTaO3 (36°YX-LT)/AT-cut 90°X-propagating quartz (AT90°X-quartz) and 27°YX-LiNbO3/AT90°X-quartz was performed by setting the metallization ratio of the interdigital transducer to a/p = 0.8 (a: electrode width, p: pitch), and the LT and LN thin-plate thicknesses to h/λ = 0.05 (λ: wavelength) and 0.1, respectively. The fractional bandwidths for 36°YX-LT/AT90°X-quartz and 27°YX-LN/AT90°X-quartz were obtained to be 1.6% and 4.0%, respectively, which were larger than those for single LT and LN. For a leaky SAW (LSAW) resonator with a/p = 0.8 fabricated on 36°YX-LT/AT0°X-quartz, the resonance properties and temperature coefficient of frequency of LSAW fundamental waves and harmonics were measured. The measured fractional bandwidth increased from 0.8% to 1.4% for single LT.
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U2 - 10.35848/1347-4065/abeff2
DO - 10.35848/1347-4065/abeff2
M3 - Article
AN - SCOPUS:85104823962
SN - 0021-4922
VL - 60
JO - Japanese journal of applied physics
JF - Japanese journal of applied physics
IS - SD
M1 - SDDC07
ER -