TY - GEN
T1 - Enhancement of sensitivity for the evaluation of electrical properties by modifying the nano structure of microwave AFM probe
AU - Zhang, Lan
AU - Ju, Yang
AU - Hosoi, Atsushi
AU - Fujimoto, Akifumi
PY - 2011
Y1 - 2011
N2 - To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated. Au and glass samples were measured by the probes working at a non-contact AFM mode. The M-AFM probe with the nano-slit having the width of 75 nm, by which the difference of the measured voltage between Au and glass samples is 55.1 mV, shows the highest sensitivity for detecting electrical properties of materials. As the result illustrated, the M-AFM probe with smaller width nano-slit on the tip can be considered to be an ideal nano structure.
AB - To confirm the sensitivity in the measurement of electrical properties affected by the nano structure of microwave AFM (M-AFM) probe, three kinds of M-AFM probe with a nano-slit on its tip in different width (75 nm, 120 nm and 160 nm) were investigated. Au and glass samples were measured by the probes working at a non-contact AFM mode. The M-AFM probe with the nano-slit having the width of 75 nm, by which the difference of the measured voltage between Au and glass samples is 55.1 mV, shows the highest sensitivity for detecting electrical properties of materials. As the result illustrated, the M-AFM probe with smaller width nano-slit on the tip can be considered to be an ideal nano structure.
KW - Atomic force microscope
KW - Electrical properties
KW - Microwave
KW - Nanotechnology
UR - http://www.scopus.com/inward/record.url?scp=79952563513&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=79952563513&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/MSF.675-677.555
DO - 10.4028/www.scientific.net/MSF.675-677.555
M3 - Conference contribution
AN - SCOPUS:79952563513
SN - 9783037850497
T3 - Materials Science Forum
SP - 555
EP - 558
BT - Advanced Material Science and Technology
PB - Trans Tech Publications Ltd
ER -