Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT

Naoya Iwata; Sarina Kinoshita; Junjun Jia; Masashi Suzuki; Takahiko Yanagitani

doi:10.1109/IUS46767.2020.9251775

Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT

Naoya Iwata, Sarina Kinoshita, Junjun Jia, Masashi Suzuki, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.

Original language	English
Title of host publication	IUS 2020 - International Ultrasonics Symposium, Proceedings
Publisher	IEEE Computer Society
ISBN (Electronic)	9781728154480
DOIs	https://doi.org/10.1109/IUS46767.2020.9251775
Publication status	Published - 2020 Sept 7
Event	2020 IEEE International Ultrasonics Symposium, IUS 2020 - Las Vegas, United States Duration: 2020 Sept 7 → 2020 Sept 11

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2020-September
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2020 IEEE International Ultrasonics Symposium, IUS 2020
Country/Territory	United States
City	Las Vegas
Period	20/9/7 → 20/9/11

Keywords

BAW filter
YbAlN

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/IUS46767.2020.9251775

Cite this

Iwata, N., Kinoshita, S., Jia, J., Suzuki, M., & Yanagitani, T. (2020). Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT. In IUS 2020 - International Ultrasonics Symposium, Proceedings Article 9251775 (IEEE International Ultrasonics Symposium, IUS; Vol. 2020-September). IEEE Computer Society. https://doi.org/10.1109/IUS46767.2020.9251775

Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT. / Iwata, Naoya; Kinoshita, Sarina; Jia, Junjun et al.
IUS 2020 - International Ultrasonics Symposium, Proceedings. IEEE Computer Society, 2020. 9251775 (IEEE International Ultrasonics Symposium, IUS; Vol. 2020-September).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Iwata, N, Kinoshita, S, Jia, J, Suzuki, M & Yanagitani, T 2020, Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT. in IUS 2020 - International Ultrasonics Symposium, Proceedings., 9251775, IEEE International Ultrasonics Symposium, IUS, vol. 2020-September, IEEE Computer Society, 2020 IEEE International Ultrasonics Symposium, IUS 2020, Las Vegas, United States, 20/9/7. https://doi.org/10.1109/IUS46767.2020.9251775

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title = "Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT",

abstract = "In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.",

keywords = "BAW filter, YbAlN",

author = "Naoya Iwata and Sarina Kinoshita and Junjun Jia and Masashi Suzuki and Takahiko Yanagitani",

note = "Funding Information: ACKNOWLEDGMENT This work was supported by the JST CREST (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037). Publisher Copyright: {\textcopyright} 2020 IEEE.; 2020 IEEE International Ultrasonics Symposium, IUS 2020 ; Conference date: 07-09-2020 Through 11-09-2020",

year = "2020",

month = sep,

day = "7",

doi = "10.1109/IUS46767.2020.9251775",

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series = "IEEE International Ultrasonics Symposium, IUS",

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AU - Iwata, Naoya

AU - Kinoshita, Sarina

AU - Jia, Junjun

AU - Suzuki, Masashi

AU - Yanagitani, Takahiko

N1 - Funding Information: ACKNOWLEDGMENT This work was supported by the JST CREST (No. JPMJCR20Q1) and KAKENHI (Grant-in-Aid for Scientific Research No.19H02202, and No.18K19037). Publisher Copyright: © 2020 IEEE.

PY - 2020/9/7

Y1 - 2020/9/7

N2 - In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.

AB - In the RF filter, both high kt2and high Qm are required. Now AlN films are used in the BAW filters because of high Qm, but AlN has low kt2• Our group previously found the enhancement of kt2 in YbAlN films [1] and reported theoretical prediction of k332 in YbxAl1-xN for the range of x=0 to 11 % [2]. In this study, we report the theoretical prediction of characteristic in YbxAl1-xN for the range of x=16.7 to 33% Furthermore, we estimate the experimental mechanical quality factor Qm of the YbAlN thin film. As a result, when Yb atomic concentration is 33%, the k332 of YbAlN is predicted to be 22%. It is approximately 3 times that of pure AlN. It was also confirmed that the Qm decreased with doping Yb.

KW - BAW filter

KW - YbAlN

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PB - IEEE Computer Society

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Experimental and theoretical investigation of kt2and mechanical quality factor Qm in YbAlN films using DFT

Abstract

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