Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films

Song Li; Junjun Jia; Naoya Iwata; Takahiko Yanagitani

doi:10.1109/IUS54386.2022.9958325

Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films

Song Li, Junjun Jia, Naoya Iwata, Takahiko Yanagitani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Epitaxial YbAlN, YbGaN and ScAlN films were successfully fabricated by magnetron sputtering. The electromechanical coupling coefficient is 4.5% in the epitaxial Sc0.03Al0.97N film and reaches to 4.8% in the epitaxial Yb0.27Al0.73N film. Compare with the polycrystalline films, the epitaxial YbGaN films show a higher k-{t}{2}, close to the theoretical values calculated by first principles calculations, especially at high doping Yb concentrations. This suggests that the use of epitaxial piezoelectric films in the resonator is a feasible approach to improve the performance of frequency filters.

Original language	English
Title of host publication	IUS 2022 - IEEE International Ultrasonics Symposium
Publisher	IEEE Computer Society
ISBN (Electronic)	9781665466578
DOIs	https://doi.org/10.1109/IUS54386.2022.9958325
Publication status	Published - 2022
Event	2022 IEEE International Ultrasonics Symposium, IUS 2022 - Venice, Italy Duration: 2022 Oct 10 → 2022 Oct 13

Publication series

Name	IEEE International Ultrasonics Symposium, IUS
Volume	2022-October
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	2022 IEEE International Ultrasonics Symposium, IUS 2022
Country/Territory	Italy
City	Venice
Period	22/10/10 → 22/10/13

Keywords

electromechanical coupling coefficient
epitaxial film
YbAlN
YbGaN

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1109/IUS54386.2022.9958325

Cite this

Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films. / Li, Song; Jia, Junjun; Iwata, Naoya et al.
IUS 2022 - IEEE International Ultrasonics Symposium. IEEE Computer Society, 2022. (IEEE International Ultrasonics Symposium, IUS; Vol. 2022-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Li, S, Jia, J, Iwata, N & Yanagitani, T 2022, Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films. in IUS 2022 - IEEE International Ultrasonics Symposium. IEEE International Ultrasonics Symposium, IUS, vol. 2022-October, IEEE Computer Society, 2022 IEEE International Ultrasonics Symposium, IUS 2022, Venice, Italy, 22/10/10. https://doi.org/10.1109/IUS54386.2022.9958325

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title = "Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films",

abstract = "Epitaxial YbAlN, YbGaN and ScAlN films were successfully fabricated by magnetron sputtering. The electromechanical coupling coefficient is 4.5% in the epitaxial Sc0.03Al0.97N film and reaches to 4.8% in the epitaxial Yb0.27Al0.73N film. Compare with the polycrystalline films, the epitaxial YbGaN films show a higher k-{t}{2}, close to the theoretical values calculated by first principles calculations, especially at high doping Yb concentrations. This suggests that the use of epitaxial piezoelectric films in the resonator is a feasible approach to improve the performance of frequency filters.",

keywords = "electromechanical coupling coefficient, epitaxial film, YbAlN, YbGaN",

author = "Song Li and Junjun Jia and Naoya Iwata and Takahiko Yanagitani",

note = "Funding Information: ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST, and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734).J. Jia acknowledges the funding from JSPS KAKENHI Grant-in-Aid for Scientific Research (C) (Grant No. 20K05368), Japan. Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 IEEE International Ultrasonics Symposium, IUS 2022 ; Conference date: 10-10-2022 Through 13-10-2022",

year = "2022",

doi = "10.1109/IUS54386.2022.9958325",

language = "English",

series = "IEEE International Ultrasonics Symposium, IUS",

publisher = "IEEE Computer Society",

booktitle = "IUS 2022 - IEEE International Ultrasonics Symposium",

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AU - Li, Song

AU - Jia, Junjun

AU - Iwata, Naoya

AU - Yanagitani, Takahiko

N1 - Funding Information: ACKNOWLEDGMENT This work was supported by JST CREST (No. JPMJCR20Q1), JST FOREST, and KAKENHI (Grant-in-Aid for Scientific Research B, No.19H02202, No.21K18734).J. Jia acknowledges the funding from JSPS KAKENHI Grant-in-Aid for Scientific Research (C) (Grant No. 20K05368), Japan. Publisher Copyright: © 2022 IEEE.

PY - 2022

Y1 - 2022

N2 - Epitaxial YbAlN, YbGaN and ScAlN films were successfully fabricated by magnetron sputtering. The electromechanical coupling coefficient is 4.5% in the epitaxial Sc0.03Al0.97N film and reaches to 4.8% in the epitaxial Yb0.27Al0.73N film. Compare with the polycrystalline films, the epitaxial YbGaN films show a higher k-{t}{2}, close to the theoretical values calculated by first principles calculations, especially at high doping Yb concentrations. This suggests that the use of epitaxial piezoelectric films in the resonator is a feasible approach to improve the performance of frequency filters.

AB - Epitaxial YbAlN, YbGaN and ScAlN films were successfully fabricated by magnetron sputtering. The electromechanical coupling coefficient is 4.5% in the epitaxial Sc0.03Al0.97N film and reaches to 4.8% in the epitaxial Yb0.27Al0.73N film. Compare with the polycrystalline films, the epitaxial YbGaN films show a higher k-{t}{2}, close to the theoretical values calculated by first principles calculations, especially at high doping Yb concentrations. This suggests that the use of epitaxial piezoelectric films in the resonator is a feasible approach to improve the performance of frequency filters.

KW - electromechanical coupling coefficient

KW - epitaxial film

KW - YbAlN

KW - YbGaN

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AN - SCOPUS:85143765676

T3 - IEEE International Ultrasonics Symposium, IUS

BT - IUS 2022 - IEEE International Ultrasonics Symposium

PB - IEEE Computer Society

T2 - 2022 IEEE International Ultrasonics Symposium, IUS 2022

Y2 - 10 October 2022 through 13 October 2022

ER -

Experimental and theoretical investigations of enhanced electromechanical properties in YbAlN and YbGaN films

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