Fabrication and properties of microcapacitors with a one-nanometer-thick single Ti0.87O2 nanosheet

Daisuke Ogawa; Kosho Akatsuka; Tomoteru Fukumura; Minoru Osada; Takayoshi Sasaki; Tetsuya Hasegawa

doi:10.1246/cl.130925

Fabrication and properties of microcapacitors with a one-nanometer-thick single Ti_0.87O₂ nanosheet

Daisuke Ogawa, Kosho Akatsuka, Tomoteru Fukumura, Minoru Osada, Takayoshi Sasaki, Tetsuya Hasegawa^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

The dielectric and insulating properties of a single Ti _0.87O₂ nanosheet were investigated by fabricating an Au/single Ti_0.87O₂ nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm^-1.

Original language	English
Pages (from-to)	307-309
Number of pages	3
Journal	Chemistry Letters
Volume	43
Issue number	3
DOIs	https://doi.org/10.1246/cl.130925
Publication status	Published - 2014
Externally published	Yes

ASJC Scopus subject areas

Chemistry(all)

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abstract = "The dielectric and insulating properties of a single Ti 0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm-1.",

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AU - Ogawa, Daisuke

AU - Akatsuka, Kosho

AU - Fukumura, Tomoteru

AU - Osada, Minoru

AU - Sasaki, Takayoshi

AU - Hasegawa, Tetsuya

PY - 2014

Y1 - 2014

N2 - The dielectric and insulating properties of a single Ti 0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm-1.

AB - The dielectric and insulating properties of a single Ti 0.87O2 nanosheet were investigated by fabricating an Au/single Ti0.87O2 nanosheet/Au planar microcapacitor structure. Capacitance and electric measurements of the nanosheet microcapacitor showed reproducibly good performance as a gate insulator: almost frequency-independent capacitance up to 1 MHz and extremely high electric field endurance of ≥ 20 MV cm-1.

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Fabrication and properties of microcapacitors with a one-nanometer-thick single Ti_0.87O₂ nanosheet

Abstract

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