Fabrication of bridged glass nanopillar structure with high scratch resistance

Hiroyuki Kuwae, Takenari Sudo, Akiko Okada, Kousuke Takayama, Shuichi Shoji, Jun Mizuno*

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review


In this study, we proposed bridged glass nanopillar structures with high scratch resistance. The glass nanopillars were joined each other with bridged structures. The bridged glass nanopillars were fabricated using anisotropic talbot photolithography and reactive ion etching. AFM and FE-SEM analyses showed that the bridged glass nanopillar structures were successfully fabricated by photolithography and dry etching. Scratch resistance of the bridged glass nanopillers improved seven times stronger than that of the nanopillers without bridged structures in friction test using a flannel cloth. Furthermore, bridged glass nanopillars were not collapsed through high stress friction test using a steel wool. Additionally, self-cleaning effect of the bridged glass nanopillars with superhydrophilic behavior were successfully demonstrated by spraying water droplets. We expect that the proposed bridged glass nanopillar structures will be a highly promising technology for self-cleaning glass.

Original languageEnglish
Pages (from-to)72-77
Number of pages6
JournalIEEJ Transactions on Sensors and Micromachines
Issue number3
Publication statusPublished - 2017


  • Bridged glass nanopillars
  • Dry etching
  • Scratch resistance
  • Self-cleaning glass
  • Solar cell
  • Talbot lithography

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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