Fabrication of diamond MISFET with micron-sized gate length on boron-doped (111) surface

Takeyasu Saito*, Kyung Ho Park, Kazuyuki Hirama, Hitoshi Umezawa, Mitsuya Satoh, Hiroshi Kawarada, Hideyo Okushi

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

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Engineering & Materials Science

Chemical Compounds