@inproceedings{55ead67ab6c4462d8a4e0313fe9c0ae5,
title = "Fabrication of FePt and CoPt magnetic nanodot arrays by electrodeposition process",
abstract = "Fabrication of Co-Pt and Fe-Pt ferromagnetic nanodot arrays for the application of ultra-high density bit patterned media (BPM) by electrochemical processes was described. In order to form patterned substrates for nanodot arrays with the density higher than 1 Tbit/inch2, electron beam lithography technique was employed. Nanopatterns with 25 nm and 18 nm pitch, which correspond to 1 and 2 Tbit/inch2 were successfully formed by optimizing the condition of the lithography process, and Co-Pt and Fe-Pt with relatively high coercivity of 4.8 kOe and 10.3 kOe were formed by electrodeposition. By utilizing the nanopatterned substrates, Co-Pt and Fe-Pt nanodot arrays with 25 nm and 35 nm pitch were uniformly formed. These results demonstrate capability of the electrochemical processes for fabricating magnetic nanodot arrays with Tbit-level density.",
author = "Takayuki Homma and Siggi Wodarz and Daiki Nishiie and Tomohiro Otani and Siyuan Ge and Giovanni Zangari",
note = "Publisher Copyright: {\textcopyright}The Electrochemical Society.; Symposium on Magnetic Materials, Processes, and Devices 13 - 2014 ECS and SMEQ Joint International Meeting ; Conference date: 05-10-2014 Through 09-10-2014",
year = "2014",
doi = "10.1149/06431.0001",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "31",
pages = "1--9",
editor = "Y. Kitamoto and C. Bonhote and G. Zangari and Brankovic, {S. R.} and Gatzen, {H. H.} and T. Osaka and P. Hesketh",
booktitle = "Magnetic Materials, Processes, and Devices 13",
edition = "31",
}