Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka; J. Mizuno; T. Harada; S. Shoji

Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka^*, J. Mizuno, T. Harada, S. Shoji

^*Corresponding author for this work

Research output: Contribution to conference › Paper › peer-review

Abstract

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

Original language	English
Pages	303-307
Number of pages	5
Publication status	Published - 2004 Dec 1
Event	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States Duration: 2004 Oct 3 → 2004 Oct 8

Conference

Conference	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium
Country/Territory	United States
City	Honolulu, HI
Period	04/10/3 → 04/10/8

ASJC Scopus subject areas

Engineering(all)

Cite this

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title = "Fabrication of fine plastic microchannel by using hot embossing",

abstract = "Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.",

author = "M. Ishizuka and J. Mizuno and T. Harada and S. Shoji",

year = "2004",

month = dec,

day = "1",

language = "English",

pages = "303--307",

note = "Microfabricated Systems and MEMS VII - Proceedings of the International Symposium ; Conference date: 03-10-2004 Through 08-10-2004",

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TY - CONF

T1 - Fabrication of fine plastic microchannel by using hot embossing

AU - Ishizuka, M.

AU - Mizuno, J.

AU - Harada, T.

AU - Shoji, S.

PY - 2004/12/1

Y1 - 2004/12/1

N2 - Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

AB - Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

UR - http://www.scopus.com/inward/record.url?scp=17044410496&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=17044410496&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:17044410496

SP - 303

EP - 307

T2 - Microfabricated Systems and MEMS VII - Proceedings of the International Symposium

Y2 - 3 October 2004 through 8 October 2004

ER -

Fabrication of fine plastic microchannel by using hot embossing

Abstract

Conference

ASJC Scopus subject areas

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