@article{685c75922e2c4a7c871260a261bc6a66,
title = "Fabrication of metallic nanopatterns using the vacuum type UV-NIL equipment",
keywords = "Electrodeposition, Metallic nanopatterns, Nanoimprint, Photocurable resin, Vacuum type",
author = "Makoto Fukuhara and Jun Mizuno and Mikiko Saito and Takayuki Homma and Shuichi Shoji",
year = "2007",
month = may,
doi = "10.1002/tee.20179",
language = "English",
volume = "2",
pages = "xvii--xviii",
journal = "IEEJ Transactions on Electrical and Electronic Engineering",
issn = "1931-4973",
publisher = "John Wiley and Sons Inc.",
number = "3",
}