TY - JOUR
T1 - Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber
AU - Arakawa, T.
AU - Kudo, H.
AU - Sato, H.
AU - Kobayashi, H.
AU - Izumi, T.
AU - Ohtsuka, S.
AU - Mori, K.
AU - Shoji, S.
AU - Osaka, T.
AU - Homma, T.
AU - Mitsuda, K.
AU - Yamasaki, N.
AU - Fujimoto, R.
AU - Iyomoto, N.
AU - Oshima, T.
AU - Futamoto, K.
AU - Takei, Y.
AU - Ichitsubo, T.
AU - Fujimori, T.
AU - Yoshida, K.
AU - Ishisaki, Y.
AU - Morita, U.
AU - Koga, T.
AU - Shinozaki, K.
AU - Sato, K.
AU - Takai, N.
AU - Ohashi, T.
AU - Kuroda, Y.
AU - Onishi, M.
AU - Goto, M.
AU - Beppu, F.
N1 - Funding Information:
This work is partly supported by Japan Ministry of Education, Culture, Sports, Science & Technology Grant-in-Aid for COE Research and 21st COE of Waseda University.
PY - 2004/3/11
Y1 - 2004/3/11
N2 - We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.
AB - We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.
KW - Bi absorber
KW - Calorimeter
KW - FEM analysis
KW - Sn absorber
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U2 - 10.1016/j.nima.2003.11.371
DO - 10.1016/j.nima.2003.11.371
M3 - Article
AN - SCOPUS:12144291237
SN - 0168-9002
VL - 520
SP - 456
EP - 459
JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
IS - 1-3
ER -