Abstract
We demonstrated a novel technique to fabricate nanosized structures on a Nafion membrane, using thermal nanoimprinting with a 5 × 5 μm2 square pattern Si mold without any polymer damage. A 24 MPa thermal imprinting pressure was used for 10 min. We observed high aspect ratio (∼1:10) pillars on the surface after imprinting at 200°C. Finally, we used a novel quartz mold with a 200 nm resolution dot pattern.
Original language | English |
---|---|
Pages (from-to) | 133-135 |
Number of pages | 3 |
Journal | IEICE Transactions on Electronics |
Volume | E98C |
Issue number | 2 |
DOIs | |
Publication status | Published - 2015 Feb 1 |
Externally published | Yes |
Keywords
- Flexible devices
- Ion-conductive polymer
- Nafion
- Nanoimprinting
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering